Transparent semiconductor zinc oxide thin films deposited on glass substrates by sol-gel process

Chien Yie Tsay, Kai Shiung Fan, Yu Wu Wang, Chi Jung Chang, Yung Kuan Tseng, Chung Kwei Lin

研究成果: 雜誌貢獻文章同行評審

78 引文 斯高帕斯(Scopus)

摘要

Transparent semiconductor ZnO thin films were spin-coated onto alkali-free glass substrates by a sol-gel process. The influence of ZnO sols synthesized via different solvents (2-ME, EtOH or IPA) on the surface morphologies, microstructures, optical properties and resistivities of the obtained films were investigated. The as-coated films were annealed in ambient air at 500 °C for 1 h. X-ray diffraction results showed all polycrystalline ZnO thin films to have preferred orientation along the (0 0 2) plane. The surface morphologies, optical transmittances and resistivity values of the sol-gel derived ZnO thin films depended on the solvent used. The ZnO thin films synthesized with IPA as the solvent exhibited the highest average transmittance 92.2%, an RMS roughness of 4.52 nm and a resistivity of 1.5 × 105 Ω cm.
原文英語
頁(從 - 到)1791-1795
頁數5
期刊Ceramics International
36
發行號6
DOIs
出版狀態已發佈 - 8月 2010
對外發佈

ASJC Scopus subject areas

  • 電子、光磁材料
  • 陶瓷和複合材料
  • 製程化學與技術
  • 表面、塗料和薄膜
  • 材料化學

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