The properties of transparent semiconductor Zn1 - xTixO thin films prepared by the sol-gel method

Chien Yie Tsay, Hua Chi Cheng, Chin Yi Chen, Kan Ju Yang, Chung Kwei Lin

研究成果: 雜誌貢獻文章

32 引文 斯高帕斯(Scopus)

摘要

Transparent semiconductor thin films of Zn1 - xTixO (0 ≦ x ≦ 0.12) were deposited on alkali-free glass substrates by the sol-gel method. The effects of Ti addition on the crystallization, microstructure, optical properties and resistivity of ZnO thin films were investigated. The as-coated films were preheated at 300 °C, and then annealed at 500 °C in air ambiance. X-ray diffraction results showed all polycrystalline Zn1 - xTixO thin films with preferred orientation along the (002) plane. Ti incorporated within the ZnO thin films not only decreased surface roughness but also increased optical transmittance and electrical resistivity. In the present study, the Zn0.88Ti0.12O film exhibited the best properties, namely an average transmittance of 91.0% (an increase of ~ 12% over the pure ZnO film) and an RMS roughness value of 1.04 nm.
原文英語
頁(從 - 到)1603-1606
頁數4
期刊Thin Solid Films
518
發行號5
DOIs
出版狀態已發佈 - 十二月 31 2009
對外發佈Yes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

指紋 深入研究「The properties of transparent semiconductor Zn1 - xTixO thin films prepared by the sol-gel method」主題。共同形成了獨特的指紋。

  • 引用此