The novel fabrication method and optimum tooling design used for microlens arrays

Yung Kang Shen, Yu Sheng Shen

研究成果: 書貢獻/報告類型會議貢獻

摘要

This paper reports a simple and novel procedure for mass production of microlens arrays. In this paper, a microlens array master is formed by room temperature imprint lithography and thermal reflow process. Next, electroforming is carried out to fabricate the metal mold insert from the microlens array master. Finally, micro-hot embossing is used to replicate microlens arrays. In this paper, a L9 experimental matrix design based on the Taguchi method is constructed to optimize the replication quality of molded microlens arrays. The results of the statistical analysis indicated that the processing temperature is the principal parameter affecting the sag height of the molded microlens array. The optimal processing parameters are processing temperature of 150°C, embossing pressure of 5.21MPa, processing time of 90s and de-molding temperature of 70°C. The 200×200 arrays of molded microlens, with a diameter of 150μm, a pitch of 200μm and a sag height of 31.51μm have been successfully fabricated. The average surface roughness of the molded microlens array is 4.31nm.
原文英語
主出版物標題Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
頁面187-191
頁數5
DOIs
出版狀態已發佈 - 2006
對外發佈Yes
事件1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS - Zhuhai, 中国
持續時間: 一月 18 2006一月 21 2006

其他

其他1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
國家中国
城市Zhuhai
期間1/18/061/21/06

ASJC Scopus subject areas

  • Biotechnology
  • Materials Science (miscellaneous)

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  • 引用此

    Shen, Y. K., & Shen, Y. S. (2006). The novel fabrication method and optimum tooling design used for microlens arrays. 於 Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS (頁 187-191). [4134931] https://doi.org/10.1109/NEMS.2006.334683