The effect of nitrogen addition to Ar/CH4 gas mixture on microstructural characterization of nanocrystalline diamond

Wei Fang Lee, Chia Yu Wu, Che Tong Lin, Chiao Yun Peng, Hui Wen You, Pei Wen Peng

研究成果: 雜誌貢獻文章同行評審


In the present study, nanocrystalline diamond (NCD) nanowire films were synthesized on silicon substrates, using microwave plasma-enhanced chemical vapor deposition (PECVD) with a CH4/Ar/N2 gas mixture at moderate temperatures. The influence of nitrogen concentration on the formation of NCD was investigated. The characteristics of NCD films were evaluated using scanning electron microscopy (SEM), Raman spectroscopy, optical emission spectroscopy (OES), and a contact angle meter. NCD nanowire films with 300-500 nm length were grown with the incorporation of nitrogen. Heterostructures of sp3-bonded diamond nanowires and sp2-bonded graphite were synthesized by adding small amounts of nitrogen to the CH4/Ar gas mixture. Surface roughness became smooth and the grain size decreased as the nitrogen was introduced into the CH4/Ar gas mixture. With the increase of nitrogen concentration, the sp2/sp3 ratio of carbon bonds increased. The wettability of the NCD nanowire films was sensitive to the bonding structure. The hydrophobic and non-reactive properties of NCD nanowire films make them highly applicable for biomedical implants.
頁(從 - 到)253-258
期刊Journal of Polymer Engineering
出版狀態已發佈 - 五月 1 2014

ASJC Scopus subject areas

  • 材料化學
  • 聚合物和塑料
  • 化學工程 (全部)


深入研究「The effect of nitrogen addition to Ar/CH<sub>4</sub> gas mixture on microstructural characterization of nanocrystalline diamond」主題。共同形成了獨特的指紋。