Sub-fM DNA sensitivity by self-aligned maskless thin-film transistor-based SoC bioelectronics

Min Cheng Chen, Chang Hsien Lin, Chia Yi Lin, Fu Kuo Hsueh, Wen Hsien Huang, Yu Chung Lien, Hsiu Chih Chen, Hsiao Ting Hsueh, Che Wei Huang, Chih Ting Lin, Yin Chih Liu, Ta Hsien Lee, Mu Yi Hua, Jian Tai Qiu, Mao Chen Liu, Yao Jen Lee, Jia Min Shieh, Chia Hua Ho, Chenming Hu, Fu Liang Yang

研究成果: 書貢獻/報告類型會議貢獻

1 引文 斯高帕斯(Scopus)

摘要

This is the first study to successfully achieve record DNA sensitivity (sub-fM) by self-aligned, maskless, dual-channel, and metal-gate-based thin-film transistor nano-wire FET. Both novel device architecture (dual-channel) and optimization of integration processes (microcrystalline silicon and self-aligned sidewall sub-50 nm critical dimension) of nano-wire FET enhance the sensitivity to biological entities substantially. Meanwhile, the proposed device is accomplished with an embedded VLSI CMOS circuit. It can thus offer high application potential to pH, protein, and DNA probing in SoC-based portable bioelectronics.

原文英語
主出版物標題2012 Symposium on VLSI Technology, VLSIT 2012 - Digest of Technical Papers
頁面127-128
頁數2
DOIs
出版狀態已發佈 - 2012
對外發佈
事件2012 Symposium on VLSI Technology, VLSIT 2012 - Honolulu, HI, 美国
持續時間: 六月 12 2012六月 14 2012

出版系列

名字Digest of Technical Papers - Symposium on VLSI Technology
ISSN(列印)0743-1562

會議

會議2012 Symposium on VLSI Technology, VLSIT 2012
國家/地區美国
城市Honolulu, HI
期間6/12/126/14/12

ASJC Scopus subject areas

  • 電氣與電子工程

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