Phase transformation of diamond-like carbon/silver composite films by sputtering deposition

Shyuan Yow Chen, Keng Liang Ou, Wei Chen Huang, Kuo Tien Chu, Shih Fu Ou

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22 引文 斯高帕斯(Scopus)

摘要

This study fabricated hydrogenated diamond-like carbon/silver bioceramic films on glass substrates using radio frequency magnetron sputtering with a single silver target in an atmosphere of Ar/CH4 mixture. The effects of applied power on the composition and microstructure of bioceramic film were evaluated. A phase transformation, amorphous diamond-like carbon → nano-silver precipitation → nano-silver growth in the amorphous diamond-like carbon matrix was observed during sputtering. The film growth rate, surface roughness, silver content and size of silver nanoclusters in the films all increased with the silver target power due to the higher flux of sputtered silver species toward the substrate.
原文英語
頁(從 - 到)2575-2580
頁數6
期刊Ceramics International
39
發行號3
DOIs
出版狀態已發佈 - 四月 2013

ASJC Scopus subject areas

  • Ceramics and Composites
  • Process Chemistry and Technology
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Materials Chemistry

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