Micro-powder blasting uses the high speed gas flow which mixed the micro-particle and gas to impact the brittle substrate by the specialized nozzle. This research combined various diameters Al2O3 eroding particle with a novel masking technique to fabricate the pattern channels in soda glass with a width down to 50 μm and depth down to 90 μm The masking technology is consisted by the combination of two polymers:1) the brittle epoxy resin SU-8 for its photosensitivity and 2) The elastic and thermal-curable poly-(dimethyl siloxane) (PDMS) for its erosion resistance. This research uses the different processing parameters (gas pressure, nozzle/substrate distance, particle size, impact angle, and erosion erosion time) to find the optimal process by single-parameter method. The results show that the micro-channel becomes deeper as the gas pressure increases. The micro-channel decreases the depth as the nozzle/substrate distance increases. The surface roughness of micro-channel of microfluidic chip is about 5-6 μm.
|主出版物標題||3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS|
|出版狀態||已發佈 - 2008|
|事件||3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Sanya, 中国|
持續時間: 一月 6 2008 → 一月 9 2008
|其他||3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008|
|期間||1/6/08 → 1/9/08|
ASJC Scopus subject areas