Low-temperature formed quaternary NiZrSiGe nanocrystal memory

Chia Yu Wu, Huei Yu Huang, Chi Chang Wu

研究成果: 雜誌貢獻文章

1 引文 斯高帕斯(Scopus)

摘要

This study investigated the formation of quaternary NiZrSiGe nanocrystal (NC) flash memory by using the sol-gel spin-coating method. A solution of nickel dichloride, zirconium tetrachloride, silicon tetrachloride, and germanium tetrachloride was used as a precursor to form the sol-gel thin film. Unlike the NiZrSi control sample that exhibited a continuous and smooth film after anneal, the NiZrSiGe transformed into NCs after undergoing thermal annealing in an O2 ambient. Based on TEM analysis, the size of the nanocrystals was 2-4 nm. Compare to the NiZrSi control sample, the NiZrSiGe memory exhibits improved electrical performance in memory windows, program/erase speed, and device reliability. The memory window of the quaternary NiZrSiGe nanocrystal memory was approximately 3.84 V. The retention characteristics of the memory can be up to 106 s at room temperature measurement with an approximately 8% charge loss, or an approximately 10% charge loss at 85°C measurement. The Vt shift of the program and erase states after 104 cycles was approximately 1 V. These results show that quaternary NiZrSiGe nanocrystal devices exhibit excellent memory performance.

原文英語
頁(從 - 到)6500-6508
頁數9
期刊International Journal of Electrochemical Science
10
發行號8
出版狀態已發佈 - 2015

ASJC Scopus subject areas

  • Electrochemistry

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