Investigation of the microstructure and characterizations of TiN/CrN nanomultilayer deposited by unbalanced magnetron sputter process

Cherng Yuh Su, Cheng Tang Pan, Tai Pin Liou, Po Ta Chen, Chung Kwei Lin

研究成果: 雜誌貢獻文章同行評審

26 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds