Evaluation of radio-frequency sputter-deposited textured TiN thin films as diffusion barriers between copper and silicon

G. S. Chen, J. J. Guo, C. K. Lin, Chen Sheng Hsu, L. C. Yang, J. S. Fang

研究成果: 雜誌貢獻 › 文章 › 同行評審

49 引文 斯高帕斯（Scopus）

指紋

深入研究「Evaluation of radio-frequency sputter-deposited textured TiN thin films as diffusion barriers between copper and silicon」主題。共同形成了獨特的指紋。

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds