Erratum: Microstructure of silicon-incorporated carbon films with various silicon concentrations deposited by hybrid magnetron sputtering/chemical vapor deposition (Ceramics International (2013) 39 (5585-5590))

Hsin Chung Cheng, Da Yen Wang, Wen Chien Lan, Pei Yi Wang, Shih Fu Ou, Ya Juh Su, Keng Liang Ou

研究成果: 雜誌貢獻文章

原文英語
頁(從 - 到)8935
頁數1
期刊Ceramics International
40
發行號6
DOIs
出版狀態已發佈 - 2014

指紋

Carbon films
Magnetron sputtering
Chemical vapor deposition
Silicon
Microstructure

ASJC Scopus subject areas

  • Ceramics and Composites
  • Process Chemistry and Technology
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Materials Chemistry

引用此文

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title = "Erratum: Microstructure of silicon-incorporated carbon films with various silicon concentrations deposited by hybrid magnetron sputtering/chemical vapor deposition (Ceramics International (2013) 39 (5585-5590))",
author = "Cheng, {Hsin Chung} and Wang, {Da Yen} and Lan, {Wen Chien} and Wang, {Pei Yi} and Ou, {Shih Fu} and Su, {Ya Juh} and Ou, {Keng Liang}",
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AU - Cheng, Hsin Chung

AU - Wang, Da Yen

AU - Lan, Wen Chien

AU - Wang, Pei Yi

AU - Ou, Shih Fu

AU - Su, Ya Juh

AU - Ou, Keng Liang

PY - 2014

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SP - 8935

JO - Ceramics International

JF - Ceramics International

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