Effects of metallic interlayers on the performance of nanocrystalline diamond metal-semiconductor-metal photodetectors

C.-W. Liu, J.-A. Lee, Y.-T. Albert Sun, M.-K. BenDao, C.-R. Lin

研究成果: 雜誌貢獻文章同行評審

4 引文 斯高帕斯(Scopus)

摘要

We have designed photodetectors based on a combination of nanocrystalline diamond (NCD) and bilayer metallic layers in a metal-semiconductor-metal (MSM) structure. The NCD films were deposited on silicon substrates which nucleated by different metallic layers (tungsten, molybdenum) and nanodiamond suspension. We found that the metallic layers not only significantly improve the nucleation density of the substrates but also reduce the surface roughness of the fabricated NCD films from 8.3 nm to 4.7 nm. Furthermore, the one-step fabrication of MSM photodetectors adopts metallic interlayers consisting of two functions (diamond nucleation site and back electrodes), which shows high detection efficiency and rapid response to UV irradiation in air ambient. The W/NCD/W structure exhibits good Ohmic contact characteristics and significant changes (∼3 orders of magnitude) in photocurrent and stable reproducibility. The achievement of this research indeed demonstrates great prospects of photodetector applications of NCD films in the future.
原文英語
頁(從 - 到)581-590
頁數10
期刊Applied Surface Science
455
DOIs
出版狀態已發佈 - 十月 15 2018

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

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