Effect of solvent on morphological properties of TiO x thin film

Meng Yueh Liu, Chih Hua Chang, Chin Hsiang Chang, Jing Shun Huang, Chia Shin Chao, Yu Hong Lin, Wen Han Lin, Ching Fuh Lin

研究成果: 書貢獻/報告類型會議貢獻

摘要

Sol-gel preparation of amorphous titanium oxide (TiO x ) thin films with distinct morphological properties on the hydrophobic substrate was obtained by solution spin coating method. The TiO x thin films were deposited by three precursors using 2-methoxyethanol (2MOE), isopropanol (IPA) and mixture of 2MOE and hexane as solvents. We demonstrate evidence that the morphology of TiO x thin film is strongly related to the employment of dissimilar solvent. Among these three solvents, TiO x film obtained from 2MOE/hexane mixed solvent is a superior choice for the preparation of TiO x thin film on the hydrophobic substrate because of its smooth surface morphology.
原文英語
主出版物標題Physical Chemistry of Interfaces and Nanomaterials VIII
DOIs
出版狀態已發佈 - 十二月 1 2009
對外發佈Yes
事件Physical Chemistry of Interfaces and Nanomaterials VIII - San Diego, CA, 美国
持續時間: 八月 2 2009八月 4 2009

出版系列

名字Proceedings of SPIE - The International Society for Optical Engineering
7396
ISSN(列印)0277-786X

會議

會議Physical Chemistry of Interfaces and Nanomaterials VIII
國家美国
城市San Diego, CA
期間8/2/098/4/09

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • 引用此

    Liu, M. Y., Chang, C. H., Chang, C. H., Huang, J. S., Chao, C. S., Lin, Y. H., Lin, W. H., & Lin, C. F. (2009). Effect of solvent on morphological properties of TiO x thin film. 於 Physical Chemistry of Interfaces and Nanomaterials VIII [73960U] (Proceedings of SPIE - The International Society for Optical Engineering; 卷 7396). https://doi.org/10.1117/12.825421