摘要
In this study, transparent thin films of Sn-doped ZnO (ZnO:Sn) were deposited onto alkali-free glass substrates by a sol-gel method; the effect of Sn doping on crystallinity, microstructural and optical properties was investigated. The atomic percentages of dopant in ZnO-based sols were Sn/Zn = 0, 1, 2, 3, and 5 at.%. The as-deposited films were pre-heated at 300 °C for 10 min and then annealed in air at 500 °C for 1 h. The results show that Sn-doped ZnO thin films demonstrate obviously improved surface roughness, enhanced transmittance in the 400-600 nm wavelength range and reduced average crystallite size. Among all of the annealed ZnO-based films in this study, films doped with 2 at.% Sn concentration exhibited the best properties, namely an average transmittance of 90%, an RMS roughness value of 1.92 nm and a resistivity of 9.3 × 102 Ω-cm.
| 原文 | 英語 |
|---|---|
| 頁（從 - 到） | 1032-1036 |
| 頁數 | 5 |
| 期刊 | Thin Solid Films |
| 卷 | 517 |
| 發行號 | 3 |
| DOIs | |
| 出版狀態 | 已發佈 - 十二月 1 2008 |
| 對外發佈 | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Materials Chemistry
- Metals and Alloys
- Surfaces, Coatings and Films
- Surfaces and Interfaces
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引用此
Tsay, C. Y., Cheng, H. C., Tung, Y. T., Tuan, W. H., & Lin, C. K. (2008). Effect of Sn-doped on microstructural and optical properties of ZnO thin films deposited by sol-gel method. Thin Solid Films, 517(3), 1032-1036. https://doi.org/10.1016/j.tsf.2008.06.030