Dramatically enhanced mechanical properties of diamond-like carbon films on polymer substrate for flexible display devices via argon plasma pretreatment

Jen Ai Lee, Chii Ruey Lin, Po Chuan Pan, Chi Wen Liu, Albert Yin Tung Sun

研究成果: 雜誌貢獻文章

摘要

Hydrogen-free diamond-like carbon (DLC) films have been deposited on polyimide (PI) substrate at room temperature using the sputtering with a novel nanodiamond target. Also, argon plasma pretreatment procedure for PI substrate was optimized to improve the adhesion and characteristics of the as-prepared DLC film. The deposited DLC film on the PI substrate pretreated with −400 V of bias voltage was found to possess the highest sp3 bonding fraction of 53%, the pencil hardness of 3H, and the optical transmittance of 82%, respectively. The research work demonstrates prosperous applications of DLC films in the protective coating for commercialized optoelectronic devices.
原文英語
文章編號110551
期刊Chemical Physics
529
DOIs
出版狀態已發佈 - 一月 15 2020

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Physical and Theoretical Chemistry

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