Bias effects on microstructure, mechanical properties and corrosion resistance of arc-evaporated CrTiAlN nanocomposite films on AISI 304 stainless steel

Cheng Hsun Hsu, Chun Ying Lee, Zhao Hong Lin, Wei Yu Ho, Chung Kwei Lin

研究成果: 雜誌貢獻文章同行評審

11 引文 斯高帕斯(Scopus)

摘要

CrTiAlN films were deposited on AISI 304 stainless steel by cathodic arc evaporation under a systematic variation of the substrate bias voltage. The effects of substrate bias on the coating morphology and mechanical properties, such as structure, composition, adhesion, hardness and Young's modulus, were studied in details using field emission scanning electron microscopy, X-ray diffraction, electron probe microanalysis and indenter. Polarization test and immersion test were also carried out to evaluate the corrosion behavior of the various films. CrTiAlN films are nanocrystalline that exhibit a CrN/TiAlN multi-layered morphology. At the optimal value of substrate bias voltage (i.e., - 150 V), the CrTiAlN film showed an increased Cr content and improved properties, such as higher adhesion, higher hardness (38 ± 2 GPa), and greater Young's modulus (319 ± 16 GPa) vs. the films deposited at other substrate bias voltages. Moreover, the optimum film has better corrosion resistance in 3.5 wt.% NaCl and 20 vol.% HCl solutions.
原文英語
頁(從 - 到)4928-4932
頁數5
期刊Thin Solid Films
519
發行號15
DOIs
出版狀態已發佈 - 五月 31 2011
對外發佈Yes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

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