Analysis on characteristics of ZnO surface acoustic wave with and without micro-structures

Huei Yu Huang, Hsi Jen Chiang, Ching Zong Wu, Yi Lin, Yung Kang Shen

研究成果: 雜誌貢獻文章

摘要

In this paper, we fabricate a surface acoustic wave (SAW) device with micro-structures on a zinc oxide (ZnO) thin film and measure its signal response. The manufacturing processes of the SAW device include the fabrication of micro-structures of a SAW element and its interdigital transducer by silicon micro-machining and the fabrication of a thin film of ZnO by RF magnetron sputtering. We, then, measure the SAWproperties. This research investigates the properties of sputtered thin films for various amounts of O2/(Ar + O2) using Zn and ZnO targets. Regardless of target, the growth rate of the ZnO thin film decreases as the oxygen content increases. When the SAW is sputtered ZnO thin film using 30% oxygen, the digital signal of the SAW has better performance. The measurement signal of the SAW with micro-structures is similar to that without micro-structures.

原文英語
文章編號434
期刊Micromachines
10
發行號7
DOIs
出版狀態已發佈 - 七月 1 2019

指紋

Zinc oxide
Surface waves
Acoustic waves
Thin films
Microstructure
Oxide films
Acoustic surface wave devices
Fabrication
Oxygen
Magnetron sputtering
Transducers
Machining
Silicon

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

引用此文

Analysis on characteristics of ZnO surface acoustic wave with and without micro-structures. / Huang, Huei Yu; Chiang, Hsi Jen; Wu, Ching Zong; Lin, Yi; Shen, Yung Kang.

於: Micromachines, 卷 10, 編號 7, 434, 01.07.2019.

研究成果: 雜誌貢獻文章

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