Analysis for replication and surface roughness of micro-feature of silicon mold insert by UV-LIGA method

Chiung Fang Huang, Jeol Long Lee, Yung Kang Shen, Chi Wei Wu, Yi Lin, Sung Chih Hsu, Ming Wei Wu, Chung Yu Kao

研究成果: 雜誌貢獻文章

摘要

This study demonstrates the replication property and surface roughness for metal micro-mold that combines the replica molding (REM) and electroforming techniques. The micro-mold firstly uses the silicon wafer to fabricate the master mold by UV-LIGA method, and then uses the sputtering method to sputter the Ni element as the seed layer on the surface of master mold. The electroforming method manufactures the Ni mold insert from the master mold with seed layer. Finally, this study uses the PDMS material to replicate the micro-feature from the Ni mold insert by replica molding. This study indicates the replication property and surface roughness of different micro-feature shapes and sizes (concave and convex) for Ni mold insert and molded PDMS.
原文英語
頁(從 - 到)443-446
頁數4
期刊Advanced Materials Research
47-50 PART 1
出版狀態已發佈 - 2008
事件Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures - Hong Kong, P.R., 中国
持續時間: 七月 28 2008七月 31 2008

ASJC Scopus subject areas

  • Engineering(all)

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  • 引用此

    Huang, C. F., Lee, J. L., Shen, Y. K., Wu, C. W., Lin, Y., Hsu, S. C., Wu, M. W., & Kao, C. Y. (2008). Analysis for replication and surface roughness of micro-feature of silicon mold insert by UV-LIGA method. Advanced Materials Research, 47-50 PART 1, 443-446.