An elastomeric tactile sensor employing dielectric constant variation and applicable to orthodontia

Fan Gang Tseng, Chih Sheng Yang, Li-Chern Pan

研究成果: 書貢獻/報告類型會議貢獻

10 引文 斯高帕斯(Scopus)

摘要

This paper introduces a capacitive-type elastomeric tactile sensor for the application of orthodontia. Different from many capacitive-type tactile sensors employing gap-distance or electrode-overlap changing for pressure or shear signal measurement, this sensor applies electrostriction effect (dielectric constant change due to dielectric particles distance variation) for signal detection, thus allows electrodes placed on the same plane for orthodontia application. Biocompatible silicon rubber is used as the buffer layer to sustain large force. By particle distance variation increasing the equivalent particle concentration, this sensor can reach a sensitivity of 0.269nF/Mpa with a free load capacitance of 18pF, comparable to those from other type capacitive tactile sensors. Fabrication and simulation has been successfully carried out for comparison.
原文英語
主出版物標題Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
頁面564-567
頁數4
出版狀態已發佈 - 2004
事件17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, 荷兰
持續時間: 一月 25 2004一月 29 2004

其他

其他17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest
國家荷兰
城市Maastricht
期間1/25/041/29/04

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

指紋 深入研究「An elastomeric tactile sensor employing dielectric constant variation and applicable to orthodontia」主題。共同形成了獨特的指紋。

引用此