A novel smart nanowire biosensor with hybrid sensor/memory/CMOS technology

Min Cheng Chen, Hou Yu Chen, Chia Yi Lin, Chuan Mei Tsai, Chung Fan Hsieh, Jim Tong Horng, Jian Tai Qiu, Chien Chao Huang, Fu Liang Yang

研究成果: 書貢獻/報告類型會議貢獻

2 引文 斯高帕斯(Scopus)

摘要

For the first time, a novel smart biosensor with hybrid sensor/memory/CMOS poly-Si nanowire technology has been developed. Special designed oxide-nitride-oxide composite dielectric underneath 50nm nanowire realizes an electrically Vth-adjustable sensor to compensate device variation. The detections of pH, hydrogen peroxide and DNA are demonstrated using various functionalized receptors. A substrate-ionic coupling operation of the buried-channel field-effect sensor exhibits superior pH sensitivity (V th shift > 100mV/pH) beyond Nernst limitation. The built-in memory of nanowire devices possess steady electrically Vth adjustment (Vth programming/erasing window > 2V), enable portable physiology monitoring and in-situ recording. In this work, we report a fully CMOS-compatible technique for Lab-on-Chip biosensor application.

原文英語
主出版物標題2010 IEEE International Electron Devices Meeting, IEDM 2010
頁面36.2.1-36.2.4
DOIs
出版狀態已發佈 - 2010
對外發佈
事件2010 IEEE International Electron Devices Meeting, IEDM 2010 - San Francisco, CA, 美国
持續時間: 十二月 6 2010十二月 8 2010

出版系列

名字Technical Digest - International Electron Devices Meeting, IEDM
ISSN(列印)0163-1918

會議

會議2010 IEEE International Electron Devices Meeting, IEDM 2010
國家/地區美国
城市San Francisco, CA
期間12/6/1012/8/10

ASJC Scopus subject areas

  • 電子、光磁材料
  • 凝聚態物理學
  • 電氣與電子工程
  • 材料化學

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