A novel fabrication method and optimum tooling design for microlens arrays

Y. K. Shen; C. Y. Chang; Y. S. Shen; S. Y. Yang

A novel fabrication method and optimum tooling design for microlens arrays

Y. K. Shen, C. Y. Chang, Y. S. Shen, S. Y. Yang

研究成果: 書貢獻/報告類型 › 會議貢獻

摘要

This study uses a simple and novel procedure for microlens arrays. The master is formed by room temperature imprint lithography and thermal reflow process. The electroforming is used to fabricate the metal mold insert from master. Finally, micro-hot embossing is used to replicate microlens arrays.

原文	英語
主出版物標題	Annual Technical Conference - ANTEC, Conference Proceedings
頁面	2571-2575
頁數	5
卷	5
出版狀態	已發佈 - 2006
對外發佈	Yes
事件	Society of Plastics Engineers Annual Technical Conference 2006, ANTEC 2006 - Charlotte, NC, 美国持續時間: 五月 7 2006 → 五月 11 2006

其他

其他	Society of Plastics Engineers Annual Technical Conference 2006, ANTEC 2006
國家	美国
城市	Charlotte, NC
期間	5/7/06 → 5/11/06

ASJC Scopus subject areas

Engineering(all)

其它文件與鏈接

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引用此

@inproceedings{a607387a4a0f499ca66a8d89d6962af4,

title = "A novel fabrication method and optimum tooling design for microlens arrays",

abstract = "This study uses a simple and novel procedure for microlens arrays. The master is formed by room temperature imprint lithography and thermal reflow process. The electroforming is used to fabricate the metal mold insert from master. Finally, micro-hot embossing is used to replicate microlens arrays.",

keywords = "Deep reactive ion etching, Electroforming, Imprint lithography, Micro-hot embossing, Microlenses, Replication",

author = "Shen, {Y. K.} and Chang, {C. Y.} and Shen, {Y. S.} and Yang, {S. Y.}",

year = "2006",

language = "English",

volume = "5",

pages = "2571--2575",

booktitle = "Annual Technical Conference - ANTEC, Conference Proceedings",

note = "Society of Plastics Engineers Annual Technical Conference 2006, ANTEC 2006 ; Conference date: 07-05-2006 Through 11-05-2006",

}

TY - GEN

T1 - A novel fabrication method and optimum tooling design for microlens arrays

AU - Shen, Y. K.

AU - Chang, C. Y.

AU - Shen, Y. S.

AU - Yang, S. Y.

PY - 2006

Y1 - 2006

N2 - This study uses a simple and novel procedure for microlens arrays. The master is formed by room temperature imprint lithography and thermal reflow process. The electroforming is used to fabricate the metal mold insert from master. Finally, micro-hot embossing is used to replicate microlens arrays.

AB - This study uses a simple and novel procedure for microlens arrays. The master is formed by room temperature imprint lithography and thermal reflow process. The electroforming is used to fabricate the metal mold insert from master. Finally, micro-hot embossing is used to replicate microlens arrays.

KW - Deep reactive ion etching

KW - Electroforming

KW - Imprint lithography

KW - Micro-hot embossing

KW - Microlenses

KW - Replication

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UR - http://www.scopus.com/inward/citedby.url?scp=33745628077&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:33745628077

VL - 5

SP - 2571

EP - 2575

BT - Annual Technical Conference - ANTEC, Conference Proceedings

T2 - Society of Plastics Engineers Annual Technical Conference 2006, ANTEC 2006

Y2 - 7 May 2006 through 11 May 2006

ER -