摘要
| 原文 | 英語 |
|---|---|
| 主出版物標題 | Annual Technical Conference - ANTEC, Conference Proceedings |
| 頁面 | 2571-2575 |
| 頁數 | 5 |
| 卷 | 5 |
| 出版狀態 | 已發佈 - 2006 |
| 對外發佈 | Yes |
| 事件 | Society of Plastics Engineers Annual Technical Conference 2006, ANTEC 2006 - Charlotte, NC, 美国 持續時間: 五月 7 2006 → 五月 11 2006 |
其他
| 其他 | Society of Plastics Engineers Annual Technical Conference 2006, ANTEC 2006 |
|---|---|
| 國家 | 美国 |
| 城市 | Charlotte, NC |
| 期間 | 5/7/06 → 5/11/06 |
指紋
ASJC Scopus subject areas
- Engineering(all)
引用此文
A novel fabrication method and optimum tooling design for microlens arrays. / Shen, Y. K.; Chang, C. Y.; Shen, Y. S.; Yang, S. Y.
Annual Technical Conference - ANTEC, Conference Proceedings. 卷 5 2006. p. 2571-2575.研究成果: 書貢獻/報告類型 › 會議貢獻
}
TY - GEN
T1 - A novel fabrication method and optimum tooling design for microlens arrays
AU - Shen, Y. K.
AU - Chang, C. Y.
AU - Shen, Y. S.
AU - Yang, S. Y.
PY - 2006
Y1 - 2006
N2 - This study uses a simple and novel procedure for microlens arrays. The master is formed by room temperature imprint lithography and thermal reflow process. The electroforming is used to fabricate the metal mold insert from master. Finally, micro-hot embossing is used to replicate microlens arrays.
AB - This study uses a simple and novel procedure for microlens arrays. The master is formed by room temperature imprint lithography and thermal reflow process. The electroforming is used to fabricate the metal mold insert from master. Finally, micro-hot embossing is used to replicate microlens arrays.
KW - Deep reactive ion etching
KW - Electroforming
KW - Imprint lithography
KW - Micro-hot embossing
KW - Microlenses
KW - Replication
UR - http://www.scopus.com/inward/record.url?scp=33745628077&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33745628077&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:33745628077
VL - 5
SP - 2571
EP - 2575
BT - Annual Technical Conference - ANTEC, Conference Proceedings
ER -