Transparent semiconductor zinc oxide thin films deposited on glass substrates by sol-gel process

Chien Yie Tsay, Kai Shiung Fan, Yu Wu Wang, Chi Jung Chang, Yung Kuan Tseng, Chung Kwei Lin

Research output: Contribution to journalArticle

68 Citations (Scopus)

Abstract

Transparent semiconductor ZnO thin films were spin-coated onto alkali-free glass substrates by a sol-gel process. The influence of ZnO sols synthesized via different solvents (2-ME, EtOH or IPA) on the surface morphologies, microstructures, optical properties and resistivities of the obtained films were investigated. The as-coated films were annealed in ambient air at 500 °C for 1 h. X-ray diffraction results showed all polycrystalline ZnO thin films to have preferred orientation along the (0 0 2) plane. The surface morphologies, optical transmittances and resistivity values of the sol-gel derived ZnO thin films depended on the solvent used. The ZnO thin films synthesized with IPA as the solvent exhibited the highest average transmittance 92.2%, an RMS roughness of 4.52 nm and a resistivity of 1.5 × 105 Ω cm.

Original languageEnglish
Pages (from-to)1791-1795
Number of pages5
JournalCeramics International
Volume36
Issue number6
DOIs
Publication statusPublished - Aug 2010
Externally publishedYes

Fingerprint

Zinc Oxide
Zinc oxide
Sol-gel process
Oxide films
Semiconductor materials
Glass
Thin films
Substrates
Surface morphology
Mercaptoethanol
Opacity
Alkalies
Polymethyl Methacrylate
Sols
Sol-gels
Optical properties
Surface roughness
X ray diffraction
Microstructure
Air

Keywords

  • A. Films
  • B. Surfaces
  • C. Optical properties
  • D. ZnO
  • Sol-gel processes

ASJC Scopus subject areas

  • Ceramics and Composites
  • Process Chemistry and Technology
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Transparent semiconductor zinc oxide thin films deposited on glass substrates by sol-gel process. / Tsay, Chien Yie; Fan, Kai Shiung; Wang, Yu Wu; Chang, Chi Jung; Tseng, Yung Kuan; Lin, Chung Kwei.

In: Ceramics International, Vol. 36, No. 6, 08.2010, p. 1791-1795.

Research output: Contribution to journalArticle

Tsay, Chien Yie ; Fan, Kai Shiung ; Wang, Yu Wu ; Chang, Chi Jung ; Tseng, Yung Kuan ; Lin, Chung Kwei. / Transparent semiconductor zinc oxide thin films deposited on glass substrates by sol-gel process. In: Ceramics International. 2010 ; Vol. 36, No. 6. pp. 1791-1795.
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