The microchannel of microfluidic chip fabrication by micro-powder blasting

C. F. Huang, Y. K. Shen, Y. Lin, C. W. Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The process of micro-powder blasting is the high speed gas flow which mixed the micro-particle and gas to impact the brittle substrate by the specialized nozzle. This paper combined various diameters Al2O3 eroding particle with a novel masking technique to fabricate the pattern channels in soda glass with a width to 2000 μm and depth down to 1631 μm. The masking technology for fabricating microchannel is consisted by the combination of two polymers: 1) the elastic and thermal-curable poly-(dimethyl siloxane) (PDMS) for its erosion resistance and 2) the brittle epoxy resin SU-8 for its photosensitivity. This paper discusses the processing procedure by the different processing parameters (micro-powder impact pressure, the distance between nozzle and substrate, micro-powder size, and micro-powder impact time) to find the optimal process. The results show that the micro-powder size is the most important factor for the depth of microchannel of microfluidic chip. The surface roughness of microchannel of microfluidic chip is nearly 5-6μm.

Original languageEnglish
Title of host publicationAdvanced Materials Research
Pages367-372
Number of pages6
Volume76-78
DOIs
Publication statusPublished - 2009
Event12th International Symposium on Advances in Abrasive Technology, ISAAT2009 - Gold Coast, QLD, Australia
Duration: Sep 27 2009Sep 30 2009

Publication series

NameAdvanced Materials Research
Volume76-78
ISSN (Print)10226680

Other

Other12th International Symposium on Advances in Abrasive Technology, ISAAT2009
CountryAustralia
CityGold Coast, QLD
Period9/27/099/30/09

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Keywords

  • Depth
  • Micro-powder blasting
  • Microchannel
  • Processing parameters
  • Surface roughness

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Huang, C. F., Shen, Y. K., Lin, Y., & Wu, C. W. (2009). The microchannel of microfluidic chip fabrication by micro-powder blasting. In Advanced Materials Research (Vol. 76-78, pp. 367-372). (Advanced Materials Research; Vol. 76-78). https://doi.org/10.4028/www.scientific.net/AMR.76-78.367