The effect of deposition parameters and post treatment on the electrical properties of Mo thin films

Cherng Yuh Su, Kuang Hsiang Liao, Cheng Tang Pan, Pei Wen Peng

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

In this study, we deposited low-resistivity molybdenum (Mo) thin films on soda-lime glass substrates with good adhesion. We adjusted various deposition parameters such as the sputtering power (52-102 W), working distance (5.5-9 cm) and annealing temperature (26-400 °C) to investigate their impact on the sheet resistance. By using a DC magnetron sputtering system, we obtained Mo thin films having the lowest sheet resistance of 0.190 Ω/□ with a sputtering power of 82 W, working distance of 6.5 cm, and annealing temperature of 400 °C; in addition, these films had good adhesivity. These Mo thin films were suitable for use as the Mo back contact in Cu(In,Ga)Se 2-based solar cells.

Original languageEnglish
Pages (from-to)5936-5939
Number of pages4
JournalThin Solid Films
Volume520
Issue number18
DOIs
Publication statusPublished - Jul 1 2012

Fingerprint

Molybdenum
molybdenum
Electric properties
electrical properties
Thin films
Sheet resistance
thin films
Sputtering
sputtering
Annealing
annealing
calcium oxides
Lime
Magnetron sputtering
Solar cells
magnetron sputtering
adhesion
Adhesion
solar cells
direct current

Keywords

  • Annealing temperature
  • Molybdenum
  • Sheet resistance
  • Solar cell back contact
  • Sputtering power
  • Working distance
  • X-ray diffraction

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

The effect of deposition parameters and post treatment on the electrical properties of Mo thin films. / Su, Cherng Yuh; Liao, Kuang Hsiang; Pan, Cheng Tang; Peng, Pei Wen.

In: Thin Solid Films, Vol. 520, No. 18, 01.07.2012, p. 5936-5939.

Research output: Contribution to journalArticle

Su, Cherng Yuh ; Liao, Kuang Hsiang ; Pan, Cheng Tang ; Peng, Pei Wen. / The effect of deposition parameters and post treatment on the electrical properties of Mo thin films. In: Thin Solid Films. 2012 ; Vol. 520, No. 18. pp. 5936-5939.
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