Surface properties of copper-incorporated diamond-like carbon films deposited by hybrid magnetron sputtering

Meng Yuan Tsai, Mao Suan Huang, Li Kai Chen, Yun-Dun Shen, Ming Hong Lin, Yi Chen Chiang, Keng Liang Ou, Shih Fu Ou

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

In an effort to improve the surface properties of surgical instruments in terms of corrosion resistance, mechanical strength, anti-sticking property, and anti-bacterial performance, bioactive films of hydrogenated diamond-like carbon containing different fractions of Cu were synthesized using the radio frequency plasma enhanced chemical vapor deposition with a magnetron Cu electrode in different atmospheres comprising different proportions of Ar/CH4 mixture. The influence of the methane fraction and plasma power on the Cu content, microstructure and surface properties of the deposited films was investigated. The results show that the films included stacked nano-clusters and domains of Cu and that the size of the nano-clusters slightly increased with the Cu content and deposition time. The Cu content in the films increased with the plasma power and argon flow ratio. In addition, increasing the Cu content not only improved hardness but also roughened the surface, and consequently, increased the water contact angle of the film surface. All films exhibited a hydrophobic surface that is expected to be useful for synthesizing minimally invasive instruments.

Original languageEnglish
Pages (from-to)8335-8340
Number of pages6
JournalCeramics International
Volume39
Issue number7
DOIs
Publication statusPublished - Sep 2013

Fingerprint

Diamond like carbon films
Magnetron sputtering
Surface properties
Copper
Plasmas
Diamond
Argon
Methane
Plasma enhanced chemical vapor deposition
Contact angle
Strength of materials
Corrosion resistance
Diamonds
Carbon
Hardness
Microstructure
Electrodes
Water

Keywords

  • Biomedical applications
  • Carbon
  • Films
  • Nanocomposites

ASJC Scopus subject areas

  • Ceramics and Composites
  • Process Chemistry and Technology
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Surface properties of copper-incorporated diamond-like carbon films deposited by hybrid magnetron sputtering. / Tsai, Meng Yuan; Huang, Mao Suan; Chen, Li Kai; Shen, Yun-Dun; Lin, Ming Hong; Chiang, Yi Chen; Ou, Keng Liang; Ou, Shih Fu.

In: Ceramics International, Vol. 39, No. 7, 09.2013, p. 8335-8340.

Research output: Contribution to journalArticle

Tsai, Meng Yuan ; Huang, Mao Suan ; Chen, Li Kai ; Shen, Yun-Dun ; Lin, Ming Hong ; Chiang, Yi Chen ; Ou, Keng Liang ; Ou, Shih Fu. / Surface properties of copper-incorporated diamond-like carbon films deposited by hybrid magnetron sputtering. In: Ceramics International. 2013 ; Vol. 39, No. 7. pp. 8335-8340.
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