Sub-fM DNA sensitivity by self-aligned maskless thin-film transistor-based SoC bioelectronics

Min Cheng Chen, Chang Hsien Lin, Chia Yi Lin, Fu Kuo Hsueh, Wen Hsien Huang, Yu Chung Lien, Hsiu Chih Chen, Hsiao Ting Hsueh, Che Wei Huang, Chih Ting Lin, Yin Chih Liu, Ta Hsien Lee, Mu Yi Hua, Jian Tai Qiu, Mao Chen Liu, Yao Jen Lee, Jia Min Shieh, Chia Hua Ho, Chenming Hu, Fu Liang Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This is the first study to successfully achieve record DNA sensitivity (sub-fM) by self-aligned, maskless, dual-channel, and metal-gate-based thin-film transistor nano-wire FET. Both novel device architecture (dual-channel) and optimization of integration processes (microcrystalline silicon and self-aligned sidewall sub-50 nm critical dimension) of nano-wire FET enhance the sensitivity to biological entities substantially. Meanwhile, the proposed device is accomplished with an embedded VLSI CMOS circuit. It can thus offer high application potential to pH, protein, and DNA probing in SoC-based portable bioelectronics.

Original languageEnglish
Title of host publication2012 Symposium on VLSI Technology, VLSIT 2012 - Digest of Technical Papers
Pages127-128
Number of pages2
DOIs
Publication statusPublished - 2012
Externally publishedYes
Event2012 Symposium on VLSI Technology, VLSIT 2012 - Honolulu, HI, United States
Duration: Jun 12 2012Jun 14 2012

Publication series

NameDigest of Technical Papers - Symposium on VLSI Technology
ISSN (Print)0743-1562

Conference

Conference2012 Symposium on VLSI Technology, VLSIT 2012
CountryUnited States
CityHonolulu, HI
Period6/12/126/14/12

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Sub-fM DNA sensitivity by self-aligned maskless thin-film transistor-based SoC bioelectronics'. Together they form a unique fingerprint.

  • Cite this

    Chen, M. C., Lin, C. H., Lin, C. Y., Hsueh, F. K., Huang, W. H., Lien, Y. C., Chen, H. C., Hsueh, H. T., Huang, C. W., Lin, C. T., Liu, Y. C., Lee, T. H., Hua, M. Y., Qiu, J. T., Liu, M. C., Lee, Y. J., Shieh, J. M., Ho, C. H., Hu, C., & Yang, F. L. (2012). Sub-fM DNA sensitivity by self-aligned maskless thin-film transistor-based SoC bioelectronics. In 2012 Symposium on VLSI Technology, VLSIT 2012 - Digest of Technical Papers (pp. 127-128). [6242494] (Digest of Technical Papers - Symposium on VLSI Technology). https://doi.org/10.1109/VLSIT.2012.6242494