Study on micro fabrication of mold insert for microlens arrays by micro dispensing

Yung Kang Shen, Yi Lin, Dona Yea Sheu, Ming Der Ger, Yi Han Hu, Rong Hong, Shung Mang Wang

Research output: Contribution to journalArticle

Abstract

This work used micro dispensing technology to fabricate the master of microlens array, then uses electroforming technology to replication the Ni mold insert of microlens array and finally used micro hot embossing to replicate the plastic microlens array. This work used the Si10 resin by AutoStrade Company for dispensing material. The resin material was exposed to 80W halogen light. The resin will be hardened and become convex by surface tension effect on exposition. It can be used as the master of microlens array. This work sputtered a silver layer of 150 nm thick on the master for conducting electricity layer. The electroforming technology replicateed on the Ni mold insert from the master of microlens array. Finally, the micro hot embossing technology was used to replicate the molded microlens array. The molding experiment used PMMA and PC optical film. The experiment studied the influence of processing parameters of hot embossing by processing temperature, embossing pressure, embossing time and de-molding temperature. This work used the Taguchi's Method to search the best processing parameter for molded microlens array. This work used the microscope, surface profiler and SEM to measure the surface profile of master, mold insert and molded microlens array. This work also used AFM to measure the surface roughness of master, mold insert and molded microlens array. In addition, this work measured the optical strength and the focal length to discuss optical characteristics of molded microlens array.

Original languageEnglish
Pages (from-to)48-52
Number of pages5
JournalKey Engineering Materials
Volume364-366 I
Publication statusPublished - 2008
Externally publishedYes

Fingerprint

Microfabrication
Electroforming
Resins
Molding
Processing
Optical films
Taguchi methods
Halogens
Polymethyl Methacrylate
Silver
Surface tension
Microscopes
Electricity
Surface roughness
Experiments
Plastics
Temperature
Scanning electron microscopy
Industry

Keywords

  • Electroforming
  • Micro dispensing
  • Micro hot embossing
  • Microlens array
  • Mold insert

ASJC Scopus subject areas

  • Ceramics and Composites
  • Chemical Engineering (miscellaneous)

Cite this

Shen, Y. K., Lin, Y., Sheu, D. Y., Ger, M. D., Hu, Y. H., Hong, R., & Wang, S. M. (2008). Study on micro fabrication of mold insert for microlens arrays by micro dispensing. Key Engineering Materials, 364-366 I, 48-52.

Study on micro fabrication of mold insert for microlens arrays by micro dispensing. / Shen, Yung Kang; Lin, Yi; Sheu, Dona Yea; Ger, Ming Der; Hu, Yi Han; Hong, Rong; Wang, Shung Mang.

In: Key Engineering Materials, Vol. 364-366 I, 2008, p. 48-52.

Research output: Contribution to journalArticle

Shen, YK, Lin, Y, Sheu, DY, Ger, MD, Hu, YH, Hong, R & Wang, SM 2008, 'Study on micro fabrication of mold insert for microlens arrays by micro dispensing', Key Engineering Materials, vol. 364-366 I, pp. 48-52.
Shen, Yung Kang ; Lin, Yi ; Sheu, Dona Yea ; Ger, Ming Der ; Hu, Yi Han ; Hong, Rong ; Wang, Shung Mang. / Study on micro fabrication of mold insert for microlens arrays by micro dispensing. In: Key Engineering Materials. 2008 ; Vol. 364-366 I. pp. 48-52.
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