Fingerprint
Dive into the research topics of 'Self-Aligned Deposition Process for Ultrathin Electroless Barriers and Copper Films on Low-k Dielectric Films'. Together they form a unique fingerprint.
Engineering & Materials Science
Dielectric films
Low-k dielectric
Plasmas
Hydrogen peroxide
Copper
X ray absorption spectroscopy
Electroless plating
Atomic force microscopy
Plating
Precipitates
Transmission electron microscopy
Physics
Chemical Compounds
Dielectric films
Low-k dielectric
Copper
Plasmas
Hydrogen Peroxide
X ray absorption spectroscopy
Electroless plating
Atomic force microscopy
Plating
Precipitates
Transmission electron microscopy
Physics
Physics & Astronomy
hydrogen peroxide
plating
copper
plasma physics
pretreatment
absorption spectroscopy
aqueous solutions
precipitates
chemistry
atomic force microscopy
transmission electron microscopy
high resolution
x rays