Precision transfer and replication of ultrasonic nanoimprint

Chiung Fang Huang, Jeou Long Lee, Yung Kang Shen, Yi Lin, Chih Wei Wu

Research output: Contribution to journalArticle

Abstract

This study succeeds to replicate a micro-feature by ultrasonic nanoimprint. The conjunction effect of the pressure and the ultrasonic vibration enables flowing of plastic into a more precise micro-feature of the metal mold. The longitudinal wave generated by an ultrasonic system of the frequency 35KMz and output power 900W. The micro-feature of the Ni mold insert used in the experiment is a groove shape. The groove's width is 49 μm and its depth is 25 μm. The PMMA, PC and PP are chosen with the replication materials. This study also discusses the replication properties of plastic film by different processing parameters (delay pressure, fusion pressure, embossing pressure, delay time, fusion time and embossing time).

Original languageEnglish
Pages (from-to)411-414
Number of pages4
JournalAdvanced Materials Research
Volume47-50 PART 1
Publication statusPublished - 2008
EventMulti-functional Materials and Structures - International Conference on Multifunctional Materials and Structures - Hong Kong, P.R., China
Duration: Jul 28 2008Jul 31 2008

Fingerprint

Ultrasonics
Fusion reactions
Plastic films
Vibrations (mechanical)
Time delay
Plastics
Processing
Metals
Experiments

Keywords

  • Micro-feature
  • Optimal
  • Processing parameters
  • Replication
  • Ultrasonic nanoimprint

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Precision transfer and replication of ultrasonic nanoimprint. / Huang, Chiung Fang; Lee, Jeou Long; Shen, Yung Kang; Lin, Yi; Wu, Chih Wei.

In: Advanced Materials Research, Vol. 47-50 PART 1, 2008, p. 411-414.

Research output: Contribution to journalArticle

Huang, Chiung Fang ; Lee, Jeou Long ; Shen, Yung Kang ; Lin, Yi ; Wu, Chih Wei. / Precision transfer and replication of ultrasonic nanoimprint. In: Advanced Materials Research. 2008 ; Vol. 47-50 PART 1. pp. 411-414.
@article{09057c2c4ef34020b284ddd1d9b5fc97,
title = "Precision transfer and replication of ultrasonic nanoimprint",
abstract = "This study succeeds to replicate a micro-feature by ultrasonic nanoimprint. The conjunction effect of the pressure and the ultrasonic vibration enables flowing of plastic into a more precise micro-feature of the metal mold. The longitudinal wave generated by an ultrasonic system of the frequency 35KMz and output power 900W. The micro-feature of the Ni mold insert used in the experiment is a groove shape. The groove's width is 49 μm and its depth is 25 μm. The PMMA, PC and PP are chosen with the replication materials. This study also discusses the replication properties of plastic film by different processing parameters (delay pressure, fusion pressure, embossing pressure, delay time, fusion time and embossing time).",
keywords = "Micro-feature, Optimal, Processing parameters, Replication, Ultrasonic nanoimprint",
author = "Huang, {Chiung Fang} and Lee, {Jeou Long} and Shen, {Yung Kang} and Yi Lin and Wu, {Chih Wei}",
year = "2008",
language = "English",
volume = "47-50 PART 1",
pages = "411--414",
journal = "Advanced Materials Research",
issn = "1022-6680",
publisher = "Trans Tech Publications",

}

TY - JOUR

T1 - Precision transfer and replication of ultrasonic nanoimprint

AU - Huang, Chiung Fang

AU - Lee, Jeou Long

AU - Shen, Yung Kang

AU - Lin, Yi

AU - Wu, Chih Wei

PY - 2008

Y1 - 2008

N2 - This study succeeds to replicate a micro-feature by ultrasonic nanoimprint. The conjunction effect of the pressure and the ultrasonic vibration enables flowing of plastic into a more precise micro-feature of the metal mold. The longitudinal wave generated by an ultrasonic system of the frequency 35KMz and output power 900W. The micro-feature of the Ni mold insert used in the experiment is a groove shape. The groove's width is 49 μm and its depth is 25 μm. The PMMA, PC and PP are chosen with the replication materials. This study also discusses the replication properties of plastic film by different processing parameters (delay pressure, fusion pressure, embossing pressure, delay time, fusion time and embossing time).

AB - This study succeeds to replicate a micro-feature by ultrasonic nanoimprint. The conjunction effect of the pressure and the ultrasonic vibration enables flowing of plastic into a more precise micro-feature of the metal mold. The longitudinal wave generated by an ultrasonic system of the frequency 35KMz and output power 900W. The micro-feature of the Ni mold insert used in the experiment is a groove shape. The groove's width is 49 μm and its depth is 25 μm. The PMMA, PC and PP are chosen with the replication materials. This study also discusses the replication properties of plastic film by different processing parameters (delay pressure, fusion pressure, embossing pressure, delay time, fusion time and embossing time).

KW - Micro-feature

KW - Optimal

KW - Processing parameters

KW - Replication

KW - Ultrasonic nanoimprint

UR - http://www.scopus.com/inward/record.url?scp=56349161021&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=56349161021&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:56349161021

VL - 47-50 PART 1

SP - 411

EP - 414

JO - Advanced Materials Research

JF - Advanced Materials Research

SN - 1022-6680

ER -