新穎溶膠-凝膠法應用於非揮發性奈米微晶粒記憶體元件

Translated title of the contribution: Novel Sol-Gel Derived Nonvolatile Nanocrystal Memory Devices

蔡 依蓁(Yi-Jen Tsai), Chi-Chang Wu, 劉 品麟(Pin-Lin Liu), 柯 富祥(Fu-Hsiang Ko)

Research output: Contribution to journalArticle

Abstract

In this study, the formation mechanism of nanocrystals (NCs) from the sol-gel spin-coating method had been studied. The ZrCl4, HfCl4, and SiCl4 were used as the sol-gel precursors to form the hafnium and zirconium silicate after rapid thermal annealing at high temperature. We evaluated the impact of temperature and preparation solvent type for the formation of sol-gel derived nanocrystals. In addition, the performance of flash memory with the nanocrystal as the charge trapping layer was also demonstrated.
Original languageTraditional Chinese
Pages (from-to)21-27
Number of pages7
Journal科儀新知
Issue number166
Publication statusPublished - 2008

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蔡依蓁(Yi-Jen T, Wu, C-C., 劉品麟(Pin-Lin L, & 柯富祥(Fu-Hsiang K (2008). 新穎溶膠-凝膠法應用於非揮發性奈米微晶粒記憶體元件. 科儀新知, (166), 21-27.