In this study, the formation mechanism of nanocrystals (NCs) from the sol-gel spin-coating method had been studied. The ZrCl4, HfCl4, and SiCl4 were used as the sol-gel precursors to form the hafnium and zirconium silicate after rapid thermal annealing at high temperature. We evaluated the impact of temperature and preparation solvent type for the formation of sol-gel derived nanocrystals. In addition, the performance of flash memory with the nanocrystal as the charge trapping layer was also demonstrated.
|Original language||Traditional Chinese|
|Number of pages||7|
|Publication status||Published - 2008|