Novel coexisted sol-gel derived poly-Si-oxide-nitride-oxide-silicon type memory

Hsin Chiang You, Chi Chang Wu, Fu Hsiang Ko, Tan F. Lei, Wen L. Yang

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The authors use a very simple sol-gel spin coating method at 900 °C and 1 min rapid thermal annealing to fabricate three different poly-Si-oxide- nitride-oxide-silicon-type flash memories. The memory windows estimated from the curve of drain current versus applied gate voltage are 3, 3.3, and 4 V for (i) Hf O2 thin film, (ii) hafnium silicate nanocrystal, and (iii) coexisted hafnium silicate and zirconium silicate nanocrystal memory, respectively. Together with the measurement from gate disturbance and drain disturbance on these fabricated devices, the coexisted nanocrystal devices exhibit better reliability than both the thin film type memory and single nanocrystal type memory.

Original languageEnglish
Pages (from-to)2568-2571
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume25
Issue number6
DOIs
Publication statusPublished - 2007
Externally publishedYes

Fingerprint

Silicon oxides
silicon oxides
Polysilicon
Nitrides
Nanocrystals
Sol-gels
nitrides
gels
Silicates
nanocrystals
Data storage equipment
Hafnium
Oxides
oxides
silicates
hafnium
disturbances
Thin films
Flash memory
Rapid thermal annealing

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)
  • Surfaces and Interfaces

Cite this

Novel coexisted sol-gel derived poly-Si-oxide-nitride-oxide-silicon type memory. / You, Hsin Chiang; Wu, Chi Chang; Ko, Fu Hsiang; Lei, Tan F.; Yang, Wen L.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 25, No. 6, 2007, p. 2568-2571.

Research output: Contribution to journalArticle

You, Hsin Chiang ; Wu, Chi Chang ; Ko, Fu Hsiang ; Lei, Tan F. ; Yang, Wen L. / Novel coexisted sol-gel derived poly-Si-oxide-nitride-oxide-silicon type memory. In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2007 ; Vol. 25, No. 6. pp. 2568-2571.
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