Abstract
Micro-powder blasting uses the high speed gas flow which mixed the micro-particle and gas to impact the brittle substrate by the specialized nozzle. This research combined various diameters Al2O3 eroding particle with a novel masking technique to fabricate the pattern channels in soda glass with a width down to 50 μm and depth down to 90 μm The masking technology is consisted by the combination of two polymers:1) the brittle epoxy resin SU-8 for its photosensitivity and 2) The elastic and thermal-curable poly-(dimethyl siloxane) (PDMS) for its erosion resistance. This research uses the different processing parameters (gas pressure, nozzle/substrate distance, particle size, impact angle, and erosion erosion time) to find the optimal process by single-parameter method. The results show that the micro-channel becomes deeper as the gas pressure increases. The micro-channel decreases the depth as the nozzle/substrate distance increases. The surface roughness of micro-channel of microfluidic chip is about 5-6 μm.
| Original language | English |
|---|---|
| Title of host publication | 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS |
| Pages | 780-783 |
| Number of pages | 4 |
| DOIs | |
| Publication status | Published - 2008 |
| Event | 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Sanya, China Duration: Jan 6 2008 → Jan 9 2008 |
Other
| Other | 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 |
|---|---|
| Country | China |
| City | Sanya |
| Period | 1/6/08 → 1/9/08 |
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ASJC Scopus subject areas
- Control and Systems Engineering
- Electrical and Electronic Engineering
Cite this
Microfluidic chip fabrication by micro-powder blasting. / Shih, Yung Hsun; Shen, Yung Kang; Lin, Yi; Ou, Keng Liang; Hong, Rong Hong; Hsu, Sung Chih.
3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS. 2008. p. 780-783 4484442.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Microfluidic chip fabrication by micro-powder blasting
AU - Shih, Yung Hsun
AU - Shen, Yung Kang
AU - Lin, Yi
AU - Ou, Keng Liang
AU - Hong, Rong Hong
AU - Hsu, Sung Chih
PY - 2008
Y1 - 2008
N2 - Micro-powder blasting uses the high speed gas flow which mixed the micro-particle and gas to impact the brittle substrate by the specialized nozzle. This research combined various diameters Al2O3 eroding particle with a novel masking technique to fabricate the pattern channels in soda glass with a width down to 50 μm and depth down to 90 μm The masking technology is consisted by the combination of two polymers:1) the brittle epoxy resin SU-8 for its photosensitivity and 2) The elastic and thermal-curable poly-(dimethyl siloxane) (PDMS) for its erosion resistance. This research uses the different processing parameters (gas pressure, nozzle/substrate distance, particle size, impact angle, and erosion erosion time) to find the optimal process by single-parameter method. The results show that the micro-channel becomes deeper as the gas pressure increases. The micro-channel decreases the depth as the nozzle/substrate distance increases. The surface roughness of micro-channel of microfluidic chip is about 5-6 μm.
AB - Micro-powder blasting uses the high speed gas flow which mixed the micro-particle and gas to impact the brittle substrate by the specialized nozzle. This research combined various diameters Al2O3 eroding particle with a novel masking technique to fabricate the pattern channels in soda glass with a width down to 50 μm and depth down to 90 μm The masking technology is consisted by the combination of two polymers:1) the brittle epoxy resin SU-8 for its photosensitivity and 2) The elastic and thermal-curable poly-(dimethyl siloxane) (PDMS) for its erosion resistance. This research uses the different processing parameters (gas pressure, nozzle/substrate distance, particle size, impact angle, and erosion erosion time) to find the optimal process by single-parameter method. The results show that the micro-channel becomes deeper as the gas pressure increases. The micro-channel decreases the depth as the nozzle/substrate distance increases. The surface roughness of micro-channel of microfluidic chip is about 5-6 μm.
UR - http://www.scopus.com/inward/record.url?scp=50249089675&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=50249089675&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2008.4484442
DO - 10.1109/NEMS.2008.4484442
M3 - Conference contribution
AN - SCOPUS:50249089675
SN - 9781424419081
SP - 780
EP - 783
BT - 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS
ER -