Investigation of the microstructure and characterizations of TiN/CrN nanomultilayer deposited by unbalanced magnetron sputter process

Cherng Yuh Su, Cheng Tang Pan, Tai Pin Liou, Po Ta Chen, Chung Kwei Lin

Research output: Contribution to journalArticlepeer-review

24 Citations (Scopus)

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Engineering & Materials Science

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Chemical Compounds