Gas sensors with porous three-dimensional framework using TiO 2/polymer double-shell hollow microsphere

Chi Jung Chang, Chung Kwei Lin, Chien Chon Chen, Chin Yi Chen, En Hong Kuo

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)


The correlations between the structures and gas-sensing properties of porous thin-film gas sensors made of packed hollow spheres are investigated. For this purpose, hollow polymeric spheres were used as templates. Double-shell hollow spheres were prepared by encapsulating the polymeric hollow spheres with TiO2 shells. Solid polymeric spheres were used as templates for comparison. Porous thin-film gas sensor with interconnected three-dimensional pores was prepared by using the TiO2 encapsulated hollow spheres. The double-shell hollow spheres and porous titania films were characterized by XRD, BET, TEM and SEM. The gas-sensing properties of the sensors toward NO 2 depend on the type of template and the three-dimensional porous structure of the films. Using the hollow sphere template and adding precursors during the film formation procedure help to prevent the collapse of hollow sphere and form the mesopores in films after removing the template. These films show enhanced gas sensitivity when compared to TiO2 polycrystalline films. Such improvement in sensitivity results from the porous architecture of the hollow microsphere films which not only increase the active surface area but also promotes the gas diffusion.

Original languageEnglish
Pages (from-to)1546-1553
Number of pages8
JournalThin Solid Films
Issue number5
Publication statusPublished - Dec 30 2011
Externally publishedYes


  • Gas sensor
  • Hollow microsphere
  • Porous
  • Sensitivity
  • TiO

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces


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