Facile sol-gel preparation of nanocrystal embedded thin film material for memory device

Chi Chang Wu, Yi Jen Tsai, Pin Lin Liu, Wen Luh Yang, Fu Hsiang Ko

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A promising charge trapping film with crystal embedded material is proposed for future electronic devices. Instead of conventional high-vacuum and expensive tool, this technique adopts very cheaper process of sol-gel spin-coating for fabrication of thin film material in the charge trapping flash memory (CTFM). The crystal from spinodal phase separation is observed for sol-gel thin film at 900 C annealing, and is strongly related to the thickness of the spin-coated thin film. The morphology of the crystal from the ethanol solvent system is in the isolated form, while from 2-propanol solvent is in the interconnected structure. The sol-gel-derived CTFM from ethanol exhibits the better memory performance of retention times for

Original languageEnglish
Pages (from-to)423-430
Number of pages8
JournalJournal of materials science. Materials in medicine
Volume24
Issue number1
DOIs
Publication statusPublished - Jan 2013

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ASJC Scopus subject areas

  • Condensed Matter Physics
  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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