Facile sol-gel preparation of nanocrystal embedded thin film material for memory device

Chi Chang Wu, Yi Jen Tsai, Pin Lin Liu, Wen Luh Yang, Fu Hsiang Ko

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A promising charge trapping film with crystal embedded material is proposed for future electronic devices. Instead of conventional high-vacuum and expensive tool, this technique adopts very cheaper process of sol-gel spin-coating for fabrication of thin film material in the charge trapping flash memory (CTFM). The crystal from spinodal phase separation is observed for sol-gel thin film at 900 C annealing, and is strongly related to the thickness of the spin-coated thin film. The morphology of the crystal from the ethanol solvent system is in the isolated form, while from 2-propanol solvent is in the interconnected structure. The sol-gel-derived CTFM from ethanol exhibits the better memory performance of retention times for

Original languageEnglish
Pages (from-to)423-430
Number of pages8
JournalJournal of materials science. Materials in medicine
Volume24
Issue number1
DOIs
Publication statusPublished - Jan 2013

Fingerprint

Charge trapping
Polymethyl Methacrylate
Nanoparticles
Nanocrystals
Sol-gels
nanocrystals
Flash memory
Gels
trapping
gels
Data storage equipment
Thin films
Equipment and Supplies
preparation
Crystals
flash
Ethanol
ethyl alcohol
thin films
crystals

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

Facile sol-gel preparation of nanocrystal embedded thin film material for memory device. / Wu, Chi Chang; Tsai, Yi Jen; Liu, Pin Lin; Yang, Wen Luh; Ko, Fu Hsiang.

In: Journal of materials science. Materials in medicine, Vol. 24, No. 1, 01.2013, p. 423-430.

Research output: Contribution to journalArticle

Wu, Chi Chang ; Tsai, Yi Jen ; Liu, Pin Lin ; Yang, Wen Luh ; Ko, Fu Hsiang. / Facile sol-gel preparation of nanocrystal embedded thin film material for memory device. In: Journal of materials science. Materials in medicine. 2013 ; Vol. 24, No. 1. pp. 423-430.
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