Fabrication and analysis of microfluidic mold insert by micro electrical discharge machining

Jeou Long Lee, Yung Kang Shen, Yi Lin, Ping Tun Teng, Chuan Min Huang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This study develops an improved method for generating aluminum mold inserts used in the replication of polymer-based microfluidic chip. Since molding masters that are suitable for microfluidic chip replication must have features whose dimensions are of the order of tens to hundreds of microns, micro electrical discharge machining is employed herein to fabricate an aluminum mold insert of a microfluidic chip. The width and depth of the aluminum mold insert for the microfluidic chip are 61.50 μm and 49.61 μm, respectively. The surface roughness values of the microchannel and the sample reservoir in aluminum mold insert for the microfluidic chip are 59.92 nm and 34.34 nm, respectively. PMMA material is adopted as the molded microfluidic chip that is produced by micro-hot embossing molding. The PMMA material can replicate the microchannel and sample reservoir very well when the aluminum mold insert is used in micro-hot embossing molding. The results indicate that the most important parameter in the replication of molded microfluidic chip is the embossing pressure, which is also the most important parameter in determining the surface roughness of the molded microfluidic chip.

Original languageEnglish
Title of host publication4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Pages941-945
Number of pages5
DOIs
Publication statusPublished - 2009
Event4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 - Shenzhen, China
Duration: Jan 5 2009Jan 8 2009

Other

Other4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
CountryChina
CityShenzhen
Period1/5/091/8/09

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Keywords

  • μEDM
  • Microfluidic chip
  • Mold insert
  • Replication
  • Surface roughness

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Lee, J. L., Shen, Y. K., Lin, Y., Teng, P. T., & Huang, C. M. (2009). Fabrication and analysis of microfluidic mold insert by micro electrical discharge machining. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 (pp. 941-945). [5068729] https://doi.org/10.1109/NEMS.2009.5068729