Estimating the detection stability of a Si nanowire sensor using an additional charging electrode

Min Cheng Chen, Hsiao Chien Chen, Ta Hsien Lee, Yu Hsien Lin, Jyun Hung Shih, Bo Wei Wang, Yun Fang Hou, Yi Ju Chen, Chia Yi Lin, Chang Hsien Lin, Yi Ping Hsieh, Chia Hua Ho, Mu Yi Hua, Jian Tai Qiu, Tahui Wang, Fu Liang Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper proposes a sensing stability estimation method that involves using an additional forcing electrode to simulate the surface charge coupling effect for bottom gate nanowire sensors. The alteration of the Si nanowire can be observed by using the charging electrode without any complex surface treatment and micro-channel setup. The nanowire sensor has a distinct charge-sensitive slope (Vth shift > 60 mV/10-16C) with a wire-width scaling of 35 nm. The proposed estimation technique simplifies the charge sensing operation.

Original languageEnglish
Title of host publication2013 IEEE International Reliability Physics Symposium, IRPS 2013
PagesME.1.1-ME.1.4
DOIs
Publication statusPublished - 2013
Externally publishedYes
Event2013 IEEE International Reliability Physics Symposium, IRPS 2013 - Monterey, CA, United States
Duration: Apr 14 2013Apr 18 2013

Publication series

NameIEEE International Reliability Physics Symposium Proceedings
ISSN (Print)1541-7026

Conference

Conference2013 IEEE International Reliability Physics Symposium, IRPS 2013
CountryUnited States
CityMonterey, CA
Period4/14/134/18/13

Keywords

  • Charge coupling effect
  • dection stability
  • nanosensor fabrication
  • nanowire FET
  • semiconductive sensors

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Chen, M. C., Chen, H. C., Lee, T. H., Lin, Y. H., Shih, J. H., Wang, B. W., Hou, Y. F., Chen, Y. J., Lin, C. Y., Lin, C. H., Hsieh, Y. P., Ho, C. H., Hua, M. Y., Qiu, J. T., Wang, T., & Yang, F. L. (2013). Estimating the detection stability of a Si nanowire sensor using an additional charging electrode. In 2013 IEEE International Reliability Physics Symposium, IRPS 2013 (pp. ME.1.1-ME.1.4). [6532089] (IEEE International Reliability Physics Symposium Proceedings). https://doi.org/10.1109/IRPS.2013.6532089