- Metallic interlayers
- Microwave plasma jet chemical vapor deposition
ASJC Scopus subject areas
- Surfaces, Coatings and Films
Effects of metallic interlayers on the performance of nanocrystalline diamond metal-semiconductor-metal photodetectors. / Liu, C.-W.; Lee, J.-A.; Albert Sun, Y.-T.; BenDao, M.-K.; Lin, C.-R.In: Applied Surface Science, Vol. 455, 15.10.2018, p. 581-590.
Research output: Contribution to journal › Article
TY - JOUR
T1 - Effects of metallic interlayers on the performance of nanocrystalline diamond metal-semiconductor-metal photodetectors
AU - Liu, C.-W.
AU - Lee, J.-A.
AU - Albert Sun, Y.-T.
AU - BenDao, M.-K.
AU - Lin, C.-R.
N1 - Export Date: 25 October 2018 CODEN: ASUSE 通訊地址: Lin, C.-R.; Department of Mechanical Engineering and Institute of Precision Mechatronics Engineering, Minghsin University of Science and TechnologyTaiwan; 電子郵件: firstname.lastname@example.org 出資詳情: MEST, Ministry of Education, Science and Technology 出資詳情: NTUT-TMU-102-04, NTUT, National Taipei University of Technology 出資詳情: 106-2221-E-159-007 出資詳情: 105-2221-E-027-050 出資正文: This research work was financially supported by the main research of Co-operation project of National Taipei University of Technology and Taipei Medical University under Grant No. NTUT-TMU-102-04 , Ministry of Science and Technology of R.O.C under grant numbers MOST 105-2221-E-027-050 and MOST 106-2221-E-159-007 . 參考文獻: Peng, X., Yuan, W., Zou, J., Wang, B., Hu, W., Xiong, Y., Nitrogen-incorporated ultrananocrystalline diamond/multilayer graphene composite carbon films: Synthesis and electrochemical performances (2017) Electrochim. 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Sci., 5, pp. 91-99; Teii, K., Ikeda, T., Effect of enhanced C2 growth chemistry on nanodiamond film deposition (2007) Appl. Phys. Lett., 90, pp. 1-4; Buijnsters, J.G., Celis, J.P., Hendrikx, R.W.A., Vázquez, L., Metallic seed nanolayers for enhanced nucleation of nanocrystalline diamond thin films (2013) J. Phys. Chem. C., 117, pp. 23322-23332; Lifshitz, Y., Lee, C.H., Wu, Y., Zhang, W.J., Bello, I., Lee, S.T., Role of nucleation in nanodiamond film growth (2006) Appl. Phys. Lett., 88, p. 243114; Li, C., Effect of sputtered titanium interlayers on the properties of nanocrystalline diamond films (2016) J. Appl. Phys., 119, p. 135306; Saravanan, A., Structural modification of nanocrystalline diamond films via positive/negative bias enhanced nucleation and growth processes for improving their electron field emission properties (2015) J. Appl. Phys., 117, p. 215307; Lin, C.R., Fabrication of highly transparent ultrananocrystalline diamond films from focused microwave plasma jets (2013) Surf. Coatings Technol., 231, pp. 594-598; Wang, G., Lu, X., Ding, M., Liu, Y., Tang, W., Zhang, B., Diamond coatings deposited on cemented carbide substrates with SiC as interlayers: Preparation and erosion resistance tests (2017) Diam. Relat. Mater., 73, pp. 105-113; Li, X., Chen, J., Ye, J., Feng, T., Hu, X., Low-stress diamond films deposited on stainless steel by a two-step dropped power process in chemical vapor deposition (2018) Diam. Relat. Mater., 81, pp. 176-182; Gopal, V., Chandran, M., Rao, M.S.R., Mischler, S., Cao, S., Manivasagam, G., Tribocorrosion and electrochemical behaviour of nanocrystalline diamond coated Ti based alloys for orthopaedic application (2017) Tribol. Int., 106, pp. 88-100; Sun, T., Koeck, F.A.M., Stepanov, P.B., Nemanich, R.J., Interface and interlayer barrier effects on photo-induced electron emission from low work function diamond films (2014) Diam. Relat. Mater., 44, pp. 123-128; Wong, K.Y., Wang, Y.M., Lee, S.T., Kwok, R.W.M., Lowering of work function induced by deposition of ultra-thin rubidium fluoride layer on polycrystalline diamond surface (1999) Appl. Surf. Sci., 140, pp. 144-149; Hugosson, H.W., Eriksson, O., Jansson, U., Ruban, A.V., Souvatzis, P., Abrikosov, I.A., Surface energies and work functions of the transition metal carbides (2004) Surf. Sci., 557, pp. 243-254; Liu, H., Dandy, D.S., Studies on nucleation process in diamond CVD: an overview of recent developments (1995) Diam. Relat. Mater., 4, pp. 1173-1188; Buijnsters, J.G., Vázquez, L., terMeulen, J.J., Substrate pre-treatment by ultrasonication with diamond powder mixtures for nucleation enhancement in diamond film growth (2009) Diam. Relat. 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PY - 2018/10/15
Y1 - 2018/10/15
N2 - We have designed photodetectors based on a combination of nanocrystalline diamond (NCD) and bilayer metallic layers in a metal-semiconductor-metal (MSM) structure. The NCD films were deposited on silicon substrates which nucleated by different metallic layers (tungsten, molybdenum) and nanodiamond suspension. We found that the metallic layers not only significantly improve the nucleation density of the substrates but also reduce the surface roughness of the fabricated NCD films from 8.3 nm to 4.7 nm. Furthermore, the one-step fabrication of MSM photodetectors adopts metallic interlayers consisting of two functions (diamond nucleation site and back electrodes), which shows high detection efficiency and rapid response to UV irradiation in air ambient. The W/NCD/W structure exhibits good Ohmic contact characteristics and significant changes (∼3 orders of magnitude) in photocurrent and stable reproducibility. The achievement of this research indeed demonstrates great prospects of photodetector applications of NCD films in the future. © 2018
AB - We have designed photodetectors based on a combination of nanocrystalline diamond (NCD) and bilayer metallic layers in a metal-semiconductor-metal (MSM) structure. The NCD films were deposited on silicon substrates which nucleated by different metallic layers (tungsten, molybdenum) and nanodiamond suspension. We found that the metallic layers not only significantly improve the nucleation density of the substrates but also reduce the surface roughness of the fabricated NCD films from 8.3 nm to 4.7 nm. Furthermore, the one-step fabrication of MSM photodetectors adopts metallic interlayers consisting of two functions (diamond nucleation site and back electrodes), which shows high detection efficiency and rapid response to UV irradiation in air ambient. The W/NCD/W structure exhibits good Ohmic contact characteristics and significant changes (∼3 orders of magnitude) in photocurrent and stable reproducibility. The achievement of this research indeed demonstrates great prospects of photodetector applications of NCD films in the future. © 2018
KW - Metal-semiconductor-metal
KW - Metallic interlayers
KW - Microwave plasma jet chemical vapor deposition
KW - Nanocrystallinediamond
KW - Photodetectors
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U2 - 10.1016/j.apsusc.2018.04.196
DO - 10.1016/j.apsusc.2018.04.196
M3 - Article
VL - 455
SP - 581
EP - 590
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332