TY - JOUR
T1 - Effects of metallic interlayers on the performance of nanocrystalline diamond metal-semiconductor-metal photodetectors
AU - Liu, C.-W.
AU - Lee, J.-A.
AU - Albert Sun, Y.-T.
AU - BenDao, M.-K.
AU - Lin, C.-R.
N1 - Export Date: 25 October 2018
通訊地址: Lin, C.-R.; Department of Mechanical Engineering and Institute of Precision Mechatronics Engineering, Minghsin University of Science and TechnologyTaiwan; 電子郵件: firstname.lastname@example.org
出資詳情: MEST, Ministry of Education, Science and Technology
出資詳情: NTUT-TMU-102-04, NTUT, National Taipei University of Technology
出資正文: This research work was financially supported by the main research of Co-operation project of National Taipei University of Technology and Taipei Medical University under Grant No. NTUT-TMU-102-04 , Ministry of Science and Technology of R.O.C under grant numbers MOST 105-2221-E-027-050 and MOST 106-2221-E-159-007 .
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PY - 2018/10/15
Y1 - 2018/10/15
N2 - We have designed photodetectors based on a combination of nanocrystalline diamond (NCD) and bilayer metallic layers in a metal-semiconductor-metal (MSM) structure. The NCD films were deposited on silicon substrates which nucleated by different metallic layers (tungsten, molybdenum) and nanodiamond suspension. We found that the metallic layers not only significantly improve the nucleation density of the substrates but also reduce the surface roughness of the fabricated NCD films from 8.3 nm to 4.7 nm. Furthermore, the one-step fabrication of MSM photodetectors adopts metallic interlayers consisting of two functions (diamond nucleation site and back electrodes), which shows high detection efficiency and rapid response to UV irradiation in air ambient. The W/NCD/W structure exhibits good Ohmic contact characteristics and significant changes (∼3 orders of magnitude) in photocurrent and stable reproducibility. The achievement of this research indeed demonstrates great prospects of photodetector applications of NCD films in the future. © 2018
AB - We have designed photodetectors based on a combination of nanocrystalline diamond (NCD) and bilayer metallic layers in a metal-semiconductor-metal (MSM) structure. The NCD films were deposited on silicon substrates which nucleated by different metallic layers (tungsten, molybdenum) and nanodiamond suspension. We found that the metallic layers not only significantly improve the nucleation density of the substrates but also reduce the surface roughness of the fabricated NCD films from 8.3 nm to 4.7 nm. Furthermore, the one-step fabrication of MSM photodetectors adopts metallic interlayers consisting of two functions (diamond nucleation site and back electrodes), which shows high detection efficiency and rapid response to UV irradiation in air ambient. The W/NCD/W structure exhibits good Ohmic contact characteristics and significant changes (∼3 orders of magnitude) in photocurrent and stable reproducibility. The achievement of this research indeed demonstrates great prospects of photodetector applications of NCD films in the future. © 2018
KW - Metal-semiconductor-metal
KW - Metallic interlayers
KW - Microwave plasma jet chemical vapor deposition
KW - Nanocrystallinediamond
KW - Photodetectors
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U2 - 10.1016/j.apsusc.2018.04.196
DO - 10.1016/j.apsusc.2018.04.196
M3 - Article
SN - 0169-4332
VL - 455
SP - 581
EP - 590
JO - Applied Surface Science
JF - Applied Surface Science