Effects of metallic interlayers on the performance of nanocrystalline diamond metal-semiconductor-metal photodetectors

C.-W. Liu, J.-A. Lee, Y.-T. Albert Sun, M.-K. BenDao, C.-R. Lin

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

We have designed photodetectors based on a combination of nanocrystalline diamond (NCD) and bilayer metallic layers in a metal-semiconductor-metal (MSM) structure. The NCD films were deposited on silicon substrates which nucleated by different metallic layers (tungsten, molybdenum) and nanodiamond suspension. We found that the metallic layers not only significantly improve the nucleation density of the substrates but also reduce the surface roughness of the fabricated NCD films from 8.3 nm to 4.7 nm. Furthermore, the one-step fabrication of MSM photodetectors adopts metallic interlayers consisting of two functions (diamond nucleation site and back electrodes), which shows high detection efficiency and rapid response to UV irradiation in air ambient. The W/NCD/W structure exhibits good Ohmic contact characteristics and significant changes (∼3 orders of magnitude) in photocurrent and stable reproducibility. The achievement of this research indeed demonstrates great prospects of photodetector applications of NCD films in the future. © 2018
Original languageEnglish
Pages (from-to)581-590
Number of pages10
JournalApplied Surface Science
Volume455
DOIs
Publication statusPublished - Oct 15 2018

Fingerprint

Diamond
Photodetectors
Diamonds
Diamond films
Metals
Semiconductor materials
Nucleation
Nanodiamonds
Tungsten
Molybdenum
Ohmic contacts
Silicon
Substrates
Photocurrents
Suspensions
Surface roughness
Irradiation
Fabrication
Electrodes
Air

Keywords

  • Metal-semiconductor-metal
  • Metallic interlayers
  • Microwave plasma jet chemical vapor deposition
  • Nanocrystallinediamond
  • Photodetectors

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

Cite this

Effects of metallic interlayers on the performance of nanocrystalline diamond metal-semiconductor-metal photodetectors. / Liu, C.-W.; Lee, J.-A.; Albert Sun, Y.-T.; BenDao, M.-K.; Lin, C.-R.

In: Applied Surface Science, Vol. 455, 15.10.2018, p. 581-590.

Research output: Contribution to journalArticle

@article{d976642252d54abfaf9803048ebcec31,
title = "Effects of metallic interlayers on the performance of nanocrystalline diamond metal-semiconductor-metal photodetectors",
abstract = "We have designed photodetectors based on a combination of nanocrystalline diamond (NCD) and bilayer metallic layers in a metal-semiconductor-metal (MSM) structure. The NCD films were deposited on silicon substrates which nucleated by different metallic layers (tungsten, molybdenum) and nanodiamond suspension. We found that the metallic layers not only significantly improve the nucleation density of the substrates but also reduce the surface roughness of the fabricated NCD films from 8.3 nm to 4.7 nm. Furthermore, the one-step fabrication of MSM photodetectors adopts metallic interlayers consisting of two functions (diamond nucleation site and back electrodes), which shows high detection efficiency and rapid response to UV irradiation in air ambient. The W/NCD/W structure exhibits good Ohmic contact characteristics and significant changes (∼3 orders of magnitude) in photocurrent and stable reproducibility. The achievement of this research indeed demonstrates great prospects of photodetector applications of NCD films in the future. {\circledC} 2018",
keywords = "Metal-semiconductor-metal, Metallic interlayers, Microwave plasma jet chemical vapor deposition, Nanocrystallinediamond, Photodetectors",
author = "C.-W. Liu and J.-A. Lee and {Albert Sun}, Y.-T. and M.-K. BenDao and C.-R. Lin",
note = "Export Date: 25 October 2018 CODEN: ASUSE 通訊地址: Lin, C.-R.; Department of Mechanical Engineering and Institute of Precision Mechatronics Engineering, Minghsin University of Science and TechnologyTaiwan; 電子郵件: crlin@ntut.edu.tw 出資詳情: MEST, Ministry of Education, Science and Technology 出資詳情: NTUT-TMU-102-04, NTUT, National Taipei University of Technology 出資詳情: 106-2221-E-159-007 出資詳情: 105-2221-E-027-050 出資正文: This research work was financially supported by the main research of Co-operation project of National Taipei University of Technology and Taipei Medical University under Grant No. NTUT-TMU-102-04 , Ministry of Science and Technology of R.O.C under grant numbers MOST 105-2221-E-027-050 and MOST 106-2221-E-159-007 . 參考文獻: Peng, X., Yuan, W., Zou, J., Wang, B., Hu, W., Xiong, Y., Nitrogen-incorporated ultrananocrystalline diamond/multilayer graphene composite carbon films: Synthesis and electrochemical performances (2017) Electrochim. Acta, 257, pp. 504-509; Choi, B.S., The effect of precursor composition on the structural properties of nanocrystalline diamond films (2018) J. Nanosci. Nanotechnol., 18, pp. 1901-1904; Lin, C.R., Improvement on the synthesis technique of ultrananocrystalline diamond films by using microwave plasma jet chemical vapor deposition (2011) J. Cryst. Growth, 326, pp. 212-217; Lin, C.R., Wei, D.H., Bendao, M.K., Chen, W.E., Liu, T.Y., Development of high-performance UV detector using nanocrystalline diamond thin film (2014) Int. J. Photoenergy., 2014; Stehlik, S., Ultrathin nanocrystalline diamond films with silicon vacancy color centers via seeding by 2 nm detonation nanodiamonds (2017) ACS Appl. Mater. Interfaces, 9 (44), pp. 38842-38853; Sankaran, K.J., Field electron emission enhancement in lithium implanted and annealed nitrogen-incorporated nanocrystalline diamond films (2017) Appl. Phys. Lett., 110, p. 261602; Lu, C., Tian, S.B., Gu, C.Z., Li, J.J., Grain boundary effect on the superconducting transition of microcrystalline boron-doped diamond films (2011) Diam. Relat. Mater., 20, pp. 217-220; Qureshi, A., Kang, W.P., Davidson, J.L., Gurbuz, Y., Review on carbon-derived, solid-state, micro and nano sensors for electrochemical sensing applications (2009) Diam. Relat. Mater., 18, pp. 1401-1420; Liao, W.H., Lin, C.R., Wei, D.H., Effect of CH4 concentration on the growth behavior, structure, and transparent properties of ultrananocrystalline diamond films synthesized by focused microwave Ar/CH4/H2 plasma jets (2013) Appl. Surf. Sci., 270, pp. 324-330; Chandran, M., Hoffman, A., Diamond film deposition on WC–Co and steel substrates with a CrN interlayer for tribological applications (2016) J. Phys. D. Appl. Phys., 49, p. 213002; Koch, C.C., Top-down synthesis of nanostructured materials: mechanical and thermal processing methods (2003) Rev. Adv. Mater. Sci., 5, pp. 91-99; Teii, K., Ikeda, T., Effect of enhanced C2 growth chemistry on nanodiamond film deposition (2007) Appl. Phys. Lett., 90, pp. 1-4; Buijnsters, J.G., Celis, J.P., Hendrikx, R.W.A., V{\'a}zquez, L., Metallic seed nanolayers for enhanced nucleation of nanocrystalline diamond thin films (2013) J. Phys. Chem. C., 117, pp. 23322-23332; Lifshitz, Y., Lee, C.H., Wu, Y., Zhang, W.J., Bello, I., Lee, S.T., Role of nucleation in nanodiamond film growth (2006) Appl. Phys. Lett., 88, p. 243114; Li, C., Effect of sputtered titanium interlayers on the properties of nanocrystalline diamond films (2016) J. Appl. Phys., 119, p. 135306; Saravanan, A., Structural modification of nanocrystalline diamond films via positive/negative bias enhanced nucleation and growth processes for improving their electron field emission properties (2015) J. Appl. Phys., 117, p. 215307; Lin, C.R., Fabrication of highly transparent ultrananocrystalline diamond films from focused microwave plasma jets (2013) Surf. Coatings Technol., 231, pp. 594-598; Wang, G., Lu, X., Ding, M., Liu, Y., Tang, W., Zhang, B., Diamond coatings deposited on cemented carbide substrates with SiC as interlayers: Preparation and erosion resistance tests (2017) Diam. Relat. Mater., 73, pp. 105-113; Li, X., Chen, J., Ye, J., Feng, T., Hu, X., Low-stress diamond films deposited on stainless steel by a two-step dropped power process in chemical vapor deposition (2018) Diam. Relat. Mater., 81, pp. 176-182; Gopal, V., Chandran, M., Rao, M.S.R., Mischler, S., Cao, S., Manivasagam, G., Tribocorrosion and electrochemical behaviour of nanocrystalline diamond coated Ti based alloys for orthopaedic application (2017) Tribol. Int., 106, pp. 88-100; Sun, T., Koeck, F.A.M., Stepanov, P.B., Nemanich, R.J., Interface and interlayer barrier effects on photo-induced electron emission from low work function diamond films (2014) Diam. Relat. Mater., 44, pp. 123-128; Wong, K.Y., Wang, Y.M., Lee, S.T., Kwok, R.W.M., Lowering of work function induced by deposition of ultra-thin rubidium fluoride layer on polycrystalline diamond surface (1999) Appl. Surf. Sci., 140, pp. 144-149; Hugosson, H.W., Eriksson, O., Jansson, U., Ruban, A.V., Souvatzis, P., Abrikosov, I.A., Surface energies and work functions of the transition metal carbides (2004) Surf. Sci., 557, pp. 243-254; Liu, H., Dandy, D.S., Studies on nucleation process in diamond CVD: an overview of recent developments (1995) Diam. Relat. Mater., 4, pp. 1173-1188; Buijnsters, J.G., V{\'a}zquez, L., terMeulen, J.J., Substrate pre-treatment by ultrasonication with diamond powder mixtures for nucleation enhancement in diamond film growth (2009) Diam. Relat. Mater., 18, pp. 1239-1246; Liao, W.H., Wei, D.H., Lin, C.R., Synthesis of highly transparent ultrananocrystalline diamond films from a low- pressure, low-temperature focused microwave plasma jet (2012) Nanoscale Res. Lett., 7, pp. 1-8; Liu, Y.K., Tso, P.L., Lin, I.N., Tzeng, Y., Chen, Y.C., Comparative study of nucleation processes for the growth of nanocrystalline diamond (2006) Diam. Relat. Mater., 15, pp. 234-238; Citroni, M., A novel method of preparation of silicon-on-diamond materials (2010) Diam. Relat. Mater., 19, pp. 950-955; Teii, K., Ikeda, T., Conductive and resistive nanocrystalline diamond films studied by Raman spectroscopy (2007) Diam. Relat. Mater., 16, pp. 753-756; Motahari, H., Bellah, S.M., Malekfar, R., A new tubular hot-wire CVD for diamond coating (2017) Appl. Phys. A Mater. Sci. Process., 123, pp. 1-7; Tallaire, A., Achard, J., Silva, F., Brinza, O., Gicquel, A., Growth of large size diamond single crystals by plasma assisted chemical vapour deposition: Recent achievements and remaining challenges (2013) Comptes Rendus Phys., 14, pp. 169-184",
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language = "English",
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}

TY - JOUR

T1 - Effects of metallic interlayers on the performance of nanocrystalline diamond metal-semiconductor-metal photodetectors

AU - Liu, C.-W.

AU - Lee, J.-A.

AU - Albert Sun, Y.-T.

AU - BenDao, M.-K.

AU - Lin, C.-R.

N1 - Export Date: 25 October 2018 CODEN: ASUSE 通訊地址: Lin, C.-R.; Department of Mechanical Engineering and Institute of Precision Mechatronics Engineering, Minghsin University of Science and TechnologyTaiwan; 電子郵件: crlin@ntut.edu.tw 出資詳情: MEST, Ministry of Education, Science and Technology 出資詳情: NTUT-TMU-102-04, NTUT, National Taipei University of Technology 出資詳情: 106-2221-E-159-007 出資詳情: 105-2221-E-027-050 出資正文: This research work was financially supported by the main research of Co-operation project of National Taipei University of Technology and Taipei Medical University under Grant No. NTUT-TMU-102-04 , Ministry of Science and Technology of R.O.C under grant numbers MOST 105-2221-E-027-050 and MOST 106-2221-E-159-007 . 參考文獻: Peng, X., Yuan, W., Zou, J., Wang, B., Hu, W., Xiong, Y., Nitrogen-incorporated ultrananocrystalline diamond/multilayer graphene composite carbon films: Synthesis and electrochemical performances (2017) Electrochim. Acta, 257, pp. 504-509; Choi, B.S., The effect of precursor composition on the structural properties of nanocrystalline diamond films (2018) J. Nanosci. Nanotechnol., 18, pp. 1901-1904; Lin, C.R., Improvement on the synthesis technique of ultrananocrystalline diamond films by using microwave plasma jet chemical vapor deposition (2011) J. Cryst. Growth, 326, pp. 212-217; Lin, C.R., Wei, D.H., Bendao, M.K., Chen, W.E., Liu, T.Y., Development of high-performance UV detector using nanocrystalline diamond thin film (2014) Int. J. Photoenergy., 2014; Stehlik, S., Ultrathin nanocrystalline diamond films with silicon vacancy color centers via seeding by 2 nm detonation nanodiamonds (2017) ACS Appl. Mater. Interfaces, 9 (44), pp. 38842-38853; Sankaran, K.J., Field electron emission enhancement in lithium implanted and annealed nitrogen-incorporated nanocrystalline diamond films (2017) Appl. Phys. Lett., 110, p. 261602; Lu, C., Tian, S.B., Gu, C.Z., Li, J.J., Grain boundary effect on the superconducting transition of microcrystalline boron-doped diamond films (2011) Diam. Relat. Mater., 20, pp. 217-220; Qureshi, A., Kang, W.P., Davidson, J.L., Gurbuz, Y., Review on carbon-derived, solid-state, micro and nano sensors for electrochemical sensing applications (2009) Diam. Relat. Mater., 18, pp. 1401-1420; Liao, W.H., Lin, C.R., Wei, D.H., Effect of CH4 concentration on the growth behavior, structure, and transparent properties of ultrananocrystalline diamond films synthesized by focused microwave Ar/CH4/H2 plasma jets (2013) Appl. Surf. Sci., 270, pp. 324-330; Chandran, M., Hoffman, A., Diamond film deposition on WC–Co and steel substrates with a CrN interlayer for tribological applications (2016) J. Phys. D. Appl. Phys., 49, p. 213002; Koch, C.C., Top-down synthesis of nanostructured materials: mechanical and thermal processing methods (2003) Rev. Adv. Mater. Sci., 5, pp. 91-99; Teii, K., Ikeda, T., Effect of enhanced C2 growth chemistry on nanodiamond film deposition (2007) Appl. Phys. Lett., 90, pp. 1-4; Buijnsters, J.G., Celis, J.P., Hendrikx, R.W.A., Vázquez, L., Metallic seed nanolayers for enhanced nucleation of nanocrystalline diamond thin films (2013) J. Phys. Chem. C., 117, pp. 23322-23332; Lifshitz, Y., Lee, C.H., Wu, Y., Zhang, W.J., Bello, I., Lee, S.T., Role of nucleation in nanodiamond film growth (2006) Appl. Phys. Lett., 88, p. 243114; Li, C., Effect of sputtered titanium interlayers on the properties of nanocrystalline diamond films (2016) J. Appl. Phys., 119, p. 135306; Saravanan, A., Structural modification of nanocrystalline diamond films via positive/negative bias enhanced nucleation and growth processes for improving their electron field emission properties (2015) J. Appl. Phys., 117, p. 215307; Lin, C.R., Fabrication of highly transparent ultrananocrystalline diamond films from focused microwave plasma jets (2013) Surf. Coatings Technol., 231, pp. 594-598; Wang, G., Lu, X., Ding, M., Liu, Y., Tang, W., Zhang, B., Diamond coatings deposited on cemented carbide substrates with SiC as interlayers: Preparation and erosion resistance tests (2017) Diam. Relat. Mater., 73, pp. 105-113; Li, X., Chen, J., Ye, J., Feng, T., Hu, X., Low-stress diamond films deposited on stainless steel by a two-step dropped power process in chemical vapor deposition (2018) Diam. Relat. Mater., 81, pp. 176-182; Gopal, V., Chandran, M., Rao, M.S.R., Mischler, S., Cao, S., Manivasagam, G., Tribocorrosion and electrochemical behaviour of nanocrystalline diamond coated Ti based alloys for orthopaedic application (2017) Tribol. Int., 106, pp. 88-100; Sun, T., Koeck, F.A.M., Stepanov, P.B., Nemanich, R.J., Interface and interlayer barrier effects on photo-induced electron emission from low work function diamond films (2014) Diam. Relat. Mater., 44, pp. 123-128; Wong, K.Y., Wang, Y.M., Lee, S.T., Kwok, R.W.M., Lowering of work function induced by deposition of ultra-thin rubidium fluoride layer on polycrystalline diamond surface (1999) Appl. Surf. Sci., 140, pp. 144-149; Hugosson, H.W., Eriksson, O., Jansson, U., Ruban, A.V., Souvatzis, P., Abrikosov, I.A., Surface energies and work functions of the transition metal carbides (2004) Surf. Sci., 557, pp. 243-254; Liu, H., Dandy, D.S., Studies on nucleation process in diamond CVD: an overview of recent developments (1995) Diam. Relat. Mater., 4, pp. 1173-1188; Buijnsters, J.G., Vázquez, L., terMeulen, J.J., Substrate pre-treatment by ultrasonication with diamond powder mixtures for nucleation enhancement in diamond film growth (2009) Diam. Relat. Mater., 18, pp. 1239-1246; Liao, W.H., Wei, D.H., Lin, C.R., Synthesis of highly transparent ultrananocrystalline diamond films from a low- pressure, low-temperature focused microwave plasma jet (2012) Nanoscale Res. Lett., 7, pp. 1-8; Liu, Y.K., Tso, P.L., Lin, I.N., Tzeng, Y., Chen, Y.C., Comparative study of nucleation processes for the growth of nanocrystalline diamond (2006) Diam. Relat. Mater., 15, pp. 234-238; Citroni, M., A novel method of preparation of silicon-on-diamond materials (2010) Diam. Relat. Mater., 19, pp. 950-955; Teii, K., Ikeda, T., Conductive and resistive nanocrystalline diamond films studied by Raman spectroscopy (2007) Diam. Relat. Mater., 16, pp. 753-756; Motahari, H., Bellah, S.M., Malekfar, R., A new tubular hot-wire CVD for diamond coating (2017) Appl. Phys. A Mater. Sci. Process., 123, pp. 1-7; Tallaire, A., Achard, J., Silva, F., Brinza, O., Gicquel, A., Growth of large size diamond single crystals by plasma assisted chemical vapour deposition: Recent achievements and remaining challenges (2013) Comptes Rendus Phys., 14, pp. 169-184

PY - 2018/10/15

Y1 - 2018/10/15

N2 - We have designed photodetectors based on a combination of nanocrystalline diamond (NCD) and bilayer metallic layers in a metal-semiconductor-metal (MSM) structure. The NCD films were deposited on silicon substrates which nucleated by different metallic layers (tungsten, molybdenum) and nanodiamond suspension. We found that the metallic layers not only significantly improve the nucleation density of the substrates but also reduce the surface roughness of the fabricated NCD films from 8.3 nm to 4.7 nm. Furthermore, the one-step fabrication of MSM photodetectors adopts metallic interlayers consisting of two functions (diamond nucleation site and back electrodes), which shows high detection efficiency and rapid response to UV irradiation in air ambient. The W/NCD/W structure exhibits good Ohmic contact characteristics and significant changes (∼3 orders of magnitude) in photocurrent and stable reproducibility. The achievement of this research indeed demonstrates great prospects of photodetector applications of NCD films in the future. © 2018

AB - We have designed photodetectors based on a combination of nanocrystalline diamond (NCD) and bilayer metallic layers in a metal-semiconductor-metal (MSM) structure. The NCD films were deposited on silicon substrates which nucleated by different metallic layers (tungsten, molybdenum) and nanodiamond suspension. We found that the metallic layers not only significantly improve the nucleation density of the substrates but also reduce the surface roughness of the fabricated NCD films from 8.3 nm to 4.7 nm. Furthermore, the one-step fabrication of MSM photodetectors adopts metallic interlayers consisting of two functions (diamond nucleation site and back electrodes), which shows high detection efficiency and rapid response to UV irradiation in air ambient. The W/NCD/W structure exhibits good Ohmic contact characteristics and significant changes (∼3 orders of magnitude) in photocurrent and stable reproducibility. The achievement of this research indeed demonstrates great prospects of photodetector applications of NCD films in the future. © 2018

KW - Metal-semiconductor-metal

KW - Metallic interlayers

KW - Microwave plasma jet chemical vapor deposition

KW - Nanocrystallinediamond

KW - Photodetectors

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U2 - 10.1016/j.apsusc.2018.04.196

DO - 10.1016/j.apsusc.2018.04.196

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VL - 455

SP - 581

EP - 590

JO - Applied Surface Science

JF - Applied Surface Science

SN - 0169-4332

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