Effect of solvent on morphological properties of TiO x thin film

Meng Yueh Liu, Chih Hua Chang, Chin Hsiang Chang, Jing Shun Huang, Chia Shin Chao, Yu Hong Lin, Wen Han Lin, Ching Fuh Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Sol-gel preparation of amorphous titanium oxide (TiO x ) thin films with distinct morphological properties on the hydrophobic substrate was obtained by solution spin coating method. The TiO x thin films were deposited by three precursors using 2-methoxyethanol (2MOE), isopropanol (IPA) and mixture of 2MOE and hexane as solvents. We demonstrate evidence that the morphology of TiO x thin film is strongly related to the employment of dissimilar solvent. Among these three solvents, TiO x film obtained from 2MOE/hexane mixed solvent is a superior choice for the preparation of TiO x thin film on the hydrophobic substrate because of its smooth surface morphology.

Original languageEnglish
Title of host publicationPhysical Chemistry of Interfaces and Nanomaterials VIII
DOIs
Publication statusPublished - Dec 1 2009
Externally publishedYes
EventPhysical Chemistry of Interfaces and Nanomaterials VIII - San Diego, CA, United States
Duration: Aug 2 2009Aug 4 2009

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7396
ISSN (Print)0277-786X

Conference

ConferencePhysical Chemistry of Interfaces and Nanomaterials VIII
CountryUnited States
CitySan Diego, CA
Period8/2/098/4/09

Fingerprint

Titanium Oxide
Titanium oxides
titanium oxides
Oxide films
Thin Films
Thin films
thin films
Hexanes
Hexane
Preparation
Substrate
preparation
Sol-gel
Surface Morphology
2-Propanol
Smooth surface
Spin coating
Substrates
Precursor
Coating

Keywords

  • hydrophobic
  • solvent
  • thin film
  • TiO
  • Titanium oxide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Liu, M. Y., Chang, C. H., Chang, C. H., Huang, J. S., Chao, C. S., Lin, Y. H., ... Lin, C. F. (2009). Effect of solvent on morphological properties of TiO x thin film. In Physical Chemistry of Interfaces and Nanomaterials VIII [73960U] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7396). https://doi.org/10.1117/12.825421

Effect of solvent on morphological properties of TiO x thin film. / Liu, Meng Yueh; Chang, Chih Hua; Chang, Chin Hsiang; Huang, Jing Shun; Chao, Chia Shin; Lin, Yu Hong; Lin, Wen Han; Lin, Ching Fuh.

Physical Chemistry of Interfaces and Nanomaterials VIII. 2009. 73960U (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7396).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Liu, MY, Chang, CH, Chang, CH, Huang, JS, Chao, CS, Lin, YH, Lin, WH & Lin, CF 2009, Effect of solvent on morphological properties of TiO x thin film. in Physical Chemistry of Interfaces and Nanomaterials VIII., 73960U, Proceedings of SPIE - The International Society for Optical Engineering, vol. 7396, Physical Chemistry of Interfaces and Nanomaterials VIII, San Diego, CA, United States, 8/2/09. https://doi.org/10.1117/12.825421
Liu MY, Chang CH, Chang CH, Huang JS, Chao CS, Lin YH et al. Effect of solvent on morphological properties of TiO x thin film. In Physical Chemistry of Interfaces and Nanomaterials VIII. 2009. 73960U. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.825421
Liu, Meng Yueh ; Chang, Chih Hua ; Chang, Chin Hsiang ; Huang, Jing Shun ; Chao, Chia Shin ; Lin, Yu Hong ; Lin, Wen Han ; Lin, Ching Fuh. / Effect of solvent on morphological properties of TiO x thin film. Physical Chemistry of Interfaces and Nanomaterials VIII. 2009. (Proceedings of SPIE - The International Society for Optical Engineering).
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abstract = "Sol-gel preparation of amorphous titanium oxide (TiO x ) thin films with distinct morphological properties on the hydrophobic substrate was obtained by solution spin coating method. The TiO x thin films were deposited by three precursors using 2-methoxyethanol (2MOE), isopropanol (IPA) and mixture of 2MOE and hexane as solvents. We demonstrate evidence that the morphology of TiO x thin film is strongly related to the employment of dissimilar solvent. Among these three solvents, TiO x film obtained from 2MOE/hexane mixed solvent is a superior choice for the preparation of TiO x thin film on the hydrophobic substrate because of its smooth surface morphology.",
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AU - Lin, Yu Hong

AU - Lin, Wen Han

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