Effect of solvent on morphological properties of TiO x thin film

Meng Yueh Liu, Chih Hua Chang, Chin Hsiang Chang, Jing Shun Huang, Chia Shin Chao, Yu Hong Lin, Wen Han Lin, Ching Fuh Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Sol-gel preparation of amorphous titanium oxide (TiO x ) thin films with distinct morphological properties on the hydrophobic substrate was obtained by solution spin coating method. The TiO x thin films were deposited by three precursors using 2-methoxyethanol (2MOE), isopropanol (IPA) and mixture of 2MOE and hexane as solvents. We demonstrate evidence that the morphology of TiO x thin film is strongly related to the employment of dissimilar solvent. Among these three solvents, TiO x film obtained from 2MOE/hexane mixed solvent is a superior choice for the preparation of TiO x thin film on the hydrophobic substrate because of its smooth surface morphology.

Original languageEnglish
Title of host publicationPhysical Chemistry of Interfaces and Nanomaterials VIII
DOIs
Publication statusPublished - Dec 1 2009
Externally publishedYes
EventPhysical Chemistry of Interfaces and Nanomaterials VIII - San Diego, CA, United States
Duration: Aug 2 2009Aug 4 2009

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7396
ISSN (Print)0277-786X

Conference

ConferencePhysical Chemistry of Interfaces and Nanomaterials VIII
CountryUnited States
CitySan Diego, CA
Period8/2/098/4/09

Keywords

  • hydrophobic
  • solvent
  • thin film
  • TiO
  • Titanium oxide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Liu, M. Y., Chang, C. H., Chang, C. H., Huang, J. S., Chao, C. S., Lin, Y. H., Lin, W. H., & Lin, C. F. (2009). Effect of solvent on morphological properties of TiO x thin film. In Physical Chemistry of Interfaces and Nanomaterials VIII [73960U] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7396). https://doi.org/10.1117/12.825421