Dramatically enhanced mechanical properties of diamond-like carbon films on polymer substrate for flexible display devices via argon plasma pretreatment

Jen Ai Lee, Chii Ruey Lin, Po Chuan Pan, Chi Wen Liu, Albert Yin Tung Sun

Research output: Contribution to journalArticle


Hydrogen-free diamond-like carbon (DLC) films have been deposited on polyimide (PI) substrate at room temperature using the sputtering with a novel nanodiamond target. Also, argon plasma pretreatment procedure for PI substrate was optimized to improve the adhesion and characteristics of the as-prepared DLC film. The deposited DLC film on the PI substrate pretreated with −400 V of bias voltage was found to possess the highest sp3 bonding fraction of 53%, the pencil hardness of 3H, and the optical transmittance of 82%, respectively. The research work demonstrates prosperous applications of DLC films in the protective coating for commercialized optoelectronic devices.

Original languageEnglish
Article number110551
JournalChemical Physics
Publication statusPublished - Jan 15 2020



  • Diamond-like carbon film
  • Flexible substrate
  • Pencil hardness
  • Radio frequency unbalanced magnetron sputtering

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Physical and Theoretical Chemistry

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