Development of an active micromixer by dielectrophrosis particle manipulating

Szu I. Yeh; Ching Jiun Lee; Yu Jui Fan; Cheng Peng Liu; Horn Jiunn Sheen

doi:10.1109/NEMS.2010.5592492

Development of an active micromixer by dielectrophrosis particle manipulating

Szu I. Yeh, Ching Jiun Lee, Yu Jui Fan, Cheng Peng Liu, Horn Jiunn Sheen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

A particle manipulating micromixer was developed successfully in this study. The present device was fabricated by simply MEMS process. Only two photomasks, one for electrode array chip and another for micro-channel, were needed to manufacture the micromixer. Dielectrophoresis (DEP) force was used to manipulate the particles in the micro-channel. In this experience, polymer particles with diameter of 1μm were tested in the fluid with conductivity of 0.10mS/cm. The results show that the symmetrical vortices were observed at frequency of 100 kHz. The traveling wave DEP (twDEP) occurred when the input frequency was 10MHz. Micro-mixer chip which can stir fluid to achieve mixing was fabricated successfully by combining an electro array chip and Y-type micro-channel. The mixing performance depends on the voltage input. The flow phenomena were obtained and analyzed by micro-PIV technology. In the future, different cells can be manipulated by the present micromixer to achieve the rapid mixing with different driving frequency. It is useful in the biological or biomedical application.

Original language	English
Title of host publication	2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Pages	662-665
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2010.5592492
Publication status	Published - 2010
Externally published	Yes
Event	5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China Duration: Jan 20 2010 → Jan 23 2010

Conference

Conference	5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Country/Territory	China
City	Xiamen
Period	1/20/10 → 1/23/10

Keywords

DEP
Micromixer
Particle-manipulating

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/NEMS.2010.5592492

Cite this

Yeh, SI, Lee, CJ, Fan, YJ, Liu, CP & Sheen, HJ 2010, Development of an active micromixer by dielectrophrosis particle manipulating. in 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010., 5592492, pp. 662-665, 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, 1/20/10. https://doi.org/10.1109/NEMS.2010.5592492

@inproceedings{b1b8c8c1927e4351837ee4d983bdd2f7,

title = "Development of an active micromixer by dielectrophrosis particle manipulating",

abstract = "A particle manipulating micromixer was developed successfully in this study. The present device was fabricated by simply MEMS process. Only two photomasks, one for electrode array chip and another for micro-channel, were needed to manufacture the micromixer. Dielectrophoresis (DEP) force was used to manipulate the particles in the micro-channel. In this experience, polymer particles with diameter of 1μm were tested in the fluid with conductivity of 0.10mS/cm. The results show that the symmetrical vortices were observed at frequency of 100 kHz. The traveling wave DEP (twDEP) occurred when the input frequency was 10MHz. Micro-mixer chip which can stir fluid to achieve mixing was fabricated successfully by combining an electro array chip and Y-type micro-channel. The mixing performance depends on the voltage input. The flow phenomena were obtained and analyzed by micro-PIV technology. In the future, different cells can be manipulated by the present micromixer to achieve the rapid mixing with different driving frequency. It is useful in the biological or biomedical application.",

keywords = "DEP, Micromixer, Particle-manipulating",

author = "Yeh, {Szu I.} and Lee, {Ching Jiun} and Fan, {Yu Jui} and Liu, {Cheng Peng} and Sheen, {Horn Jiunn}",

year = "2010",

doi = "10.1109/NEMS.2010.5592492",

language = "English",

isbn = "9781424465439",

pages = "662--665",

booktitle = "2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010",

note = "5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 ; Conference date: 20-01-2010 Through 23-01-2010",

}

TY - GEN

T1 - Development of an active micromixer by dielectrophrosis particle manipulating

AU - Yeh, Szu I.

AU - Lee, Ching Jiun

AU - Fan, Yu Jui

AU - Liu, Cheng Peng

AU - Sheen, Horn Jiunn

PY - 2010

Y1 - 2010

N2 - A particle manipulating micromixer was developed successfully in this study. The present device was fabricated by simply MEMS process. Only two photomasks, one for electrode array chip and another for micro-channel, were needed to manufacture the micromixer. Dielectrophoresis (DEP) force was used to manipulate the particles in the micro-channel. In this experience, polymer particles with diameter of 1μm were tested in the fluid with conductivity of 0.10mS/cm. The results show that the symmetrical vortices were observed at frequency of 100 kHz. The traveling wave DEP (twDEP) occurred when the input frequency was 10MHz. Micro-mixer chip which can stir fluid to achieve mixing was fabricated successfully by combining an electro array chip and Y-type micro-channel. The mixing performance depends on the voltage input. The flow phenomena were obtained and analyzed by micro-PIV technology. In the future, different cells can be manipulated by the present micromixer to achieve the rapid mixing with different driving frequency. It is useful in the biological or biomedical application.

AB - A particle manipulating micromixer was developed successfully in this study. The present device was fabricated by simply MEMS process. Only two photomasks, one for electrode array chip and another for micro-channel, were needed to manufacture the micromixer. Dielectrophoresis (DEP) force was used to manipulate the particles in the micro-channel. In this experience, polymer particles with diameter of 1μm were tested in the fluid with conductivity of 0.10mS/cm. The results show that the symmetrical vortices were observed at frequency of 100 kHz. The traveling wave DEP (twDEP) occurred when the input frequency was 10MHz. Micro-mixer chip which can stir fluid to achieve mixing was fabricated successfully by combining an electro array chip and Y-type micro-channel. The mixing performance depends on the voltage input. The flow phenomena were obtained and analyzed by micro-PIV technology. In the future, different cells can be manipulated by the present micromixer to achieve the rapid mixing with different driving frequency. It is useful in the biological or biomedical application.

KW - DEP

KW - Micromixer

KW - Particle-manipulating

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U2 - 10.1109/NEMS.2010.5592492

DO - 10.1109/NEMS.2010.5592492

M3 - Conference contribution

AN - SCOPUS:78649259350

SN - 9781424465439

SP - 662

EP - 665

BT - 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

T2 - 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Y2 - 20 January 2010 through 23 January 2010

ER -

Development of an active micromixer by dielectrophrosis particle manipulating

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Keywords

ASJC Scopus subject areas

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