Development of an active micromixer by dielectrophrosis particle manipulating

Szu I. Yeh, Ching Jiun Lee, Yu Jui Fan, Cheng Peng Liu, Horn Jiunn Sheen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A particle manipulating micromixer was developed successfully in this study. The present device was fabricated by simply MEMS process. Only two photomasks, one for electrode array chip and another for micro-channel, were needed to manufacture the micromixer. Dielectrophoresis (DEP) force was used to manipulate the particles in the micro-channel. In this experience, polymer particles with diameter of 1μm were tested in the fluid with conductivity of 0.10mS/cm. The results show that the symmetrical vortices were observed at frequency of 100 kHz. The traveling wave DEP (twDEP) occurred when the input frequency was 10MHz. Micro-mixer chip which can stir fluid to achieve mixing was fabricated successfully by combining an electro array chip and Y-type micro-channel. The mixing performance depends on the voltage input. The flow phenomena were obtained and analyzed by micro-PIV technology. In the future, different cells can be manipulated by the present micromixer to achieve the rapid mixing with different driving frequency. It is useful in the biological or biomedical application.

Original languageEnglish
Title of host publication2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Pages662-665
Number of pages4
DOIs
Publication statusPublished - 2010
Externally publishedYes
Event5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China
Duration: Jan 20 2010Jan 23 2010

Conference

Conference5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
CountryChina
CityXiamen
Period1/20/101/23/10

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Keywords

  • DEP
  • Micromixer
  • Particle-manipulating

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Yeh, S. I., Lee, C. J., Fan, Y. J., Liu, C. P., & Sheen, H. J. (2010). Development of an active micromixer by dielectrophrosis particle manipulating. In 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 (pp. 662-665). [5592492] https://doi.org/10.1109/NEMS.2010.5592492