Brightness field distributions of microlens arrays using micro molding

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17 Citations (Scopus)

Abstract

This study describes the brightness field distributions of microlens arrays fabricated by micro injection molding (μIM) and micro injection-compression molding (μICM). The process for fabricating microlens arrays used room-temperature imprint lithography, photoresist reflow, electroforming, μIM, μICM, and optical properties measurement. Analytical results indicate that the brightness field distribution of the molded microlens arrays generated by μICM is better than those made using μIM. Our results further demonstrate that mold temperature is the most important processing parameter for brightness field distribution of molded microlens arrays made by μIM or μICM.

Original languageEnglish
Pages (from-to)26887-26904
Number of pages18
JournalOptics Express
Volume18
Issue number26
DOIs
Publication statusPublished - Dec 20 2010

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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