Analysis on characteristics of ZnO surface acoustic wave with and without micro-structures

Huei Yu Huang, Hsi Jen Chiang, Ching Zong Wu, Yi Lin, Yung Kang Shen

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In this paper, we fabricate a surface acoustic wave (SAW) device with micro-structures on a zinc oxide (ZnO) thin film and measure its signal response. The manufacturing processes of the SAW device include the fabrication of micro-structures of a SAW element and its interdigital transducer by silicon micro-machining and the fabrication of a thin film of ZnO by RF magnetron sputtering. We, then, measure the SAWproperties. This research investigates the properties of sputtered thin films for various amounts of O2/(Ar + O2) using Zn and ZnO targets. Regardless of target, the growth rate of the ZnO thin film decreases as the oxygen content increases. When the SAW is sputtered ZnO thin film using 30% oxygen, the digital signal of the SAW has better performance. The measurement signal of the SAW with micro-structures is similar to that without micro-structures.

Original languageEnglish
Article number434
JournalMicromachines
Volume10
Issue number7
DOIs
Publication statusPublished - Jul 1 2019

Keywords

  • Signal response
  • Silicon micromachining
  • Surface acoustic wave
  • ZnO thin film

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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