A novel smart nanowire biosensor with hybrid sensor/memory/CMOS technology

Min Cheng Chen, Hou Yu Chen, Chia Yi Lin, Chuan Mei Tsai, Chung Fan Hsieh, Jim Tong Horng, Jian Tai Qiu, Chien Chao Huang, Fu Liang Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

For the first time, a novel smart biosensor with hybrid sensor/memory/CMOS poly-Si nanowire technology has been developed. Special designed oxide-nitride-oxide composite dielectric underneath 50nm nanowire realizes an electrically Vth-adjustable sensor to compensate device variation. The detections of pH, hydrogen peroxide and DNA are demonstrated using various functionalized receptors. A substrate-ionic coupling operation of the buried-channel field-effect sensor exhibits superior pH sensitivity (V th shift > 100mV/pH) beyond Nernst limitation. The built-in memory of nanowire devices possess steady electrically Vth adjustment (Vth programming/erasing window > 2V), enable portable physiology monitoring and in-situ recording. In this work, we report a fully CMOS-compatible technique for Lab-on-Chip biosensor application.

Original languageEnglish
Title of host publication2010 IEEE International Electron Devices Meeting, IEDM 2010
Pages36.2.1-36.2.4
DOIs
Publication statusPublished - 2010
Externally publishedYes
Event2010 IEEE International Electron Devices Meeting, IEDM 2010 - San Francisco, CA, United States
Duration: Dec 6 2010Dec 8 2010

Publication series

NameTechnical Digest - International Electron Devices Meeting, IEDM
ISSN (Print)0163-1918

Conference

Conference2010 IEEE International Electron Devices Meeting, IEDM 2010
CountryUnited States
CitySan Francisco, CA
Period12/6/1012/8/10

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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  • Cite this

    Chen, M. C., Chen, H. Y., Lin, C. Y., Tsai, C. M., Hsieh, C. F., Horng, J. T., Qiu, J. T., Huang, C. C., & Yang, F. L. (2010). A novel smart nanowire biosensor with hybrid sensor/memory/CMOS technology. In 2010 IEEE International Electron Devices Meeting, IEDM 2010 (pp. 36.2.1-36.2.4). [5703485] (Technical Digest - International Electron Devices Meeting, IEDM). https://doi.org/10.1109/IEDM.2010.5703485