A novel fabrication method and optimum tooling design for microlens arrays

Y. K. Shen, C. Y. Chang, Y. S. Shen, S. Y. Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This study uses a simple and novel procedure for microlens arrays. The master is formed by room temperature imprint lithography and thermal reflow process. The electroforming is used to fabricate the metal mold insert from master. Finally, micro-hot embossing is used to replicate microlens arrays.

Original languageEnglish
Title of host publicationAnnual Technical Conference - ANTEC, Conference Proceedings
Pages2571-2575
Number of pages5
Volume5
Publication statusPublished - 2006
Externally publishedYes
EventSociety of Plastics Engineers Annual Technical Conference 2006, ANTEC 2006 - Charlotte, NC, United States
Duration: May 7 2006May 11 2006

Other

OtherSociety of Plastics Engineers Annual Technical Conference 2006, ANTEC 2006
CountryUnited States
CityCharlotte, NC
Period5/7/065/11/06

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Keywords

  • Deep reactive ion etching
  • Electroforming
  • Imprint lithography
  • Micro-hot embossing
  • Microlenses
  • Replication

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Shen, Y. K., Chang, C. Y., Shen, Y. S., & Yang, S. Y. (2006). A novel fabrication method and optimum tooling design for microlens arrays. In Annual Technical Conference - ANTEC, Conference Proceedings (Vol. 5, pp. 2571-2575)