A Novel Approach to Fabricate Silicon Nanowire Field Effect Transistor for Biomolecule Sensing

Chi Chang Wu, Yankuba B. Manga, Jia Yang Hung, Wen Luh Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A novel silicon nanowire field effect transistor (SiNW-FET) was fabricated using complementary metal oxide semiconductor (CMOS) compatible technology. The shrank nanowire with high surface-to-volume ratio and individual back gate were achieved by the local-oxidation of silicon (LOCOS) process. The width of nanowire by this technique can be shrank down to sub 100, nm. The drain current versus gate voltage (Id-Vg) characteristic of the SiNW-FET exhibits about five orders of magnitude of Ion/Ioff current ratio, and the threshold voltage shifts positively after hybridization of 1fM concentrations of HBV X gene DNA fragments and 3, ng/mL concentrations of the cancer marker, respectively. The results show that the back-gated nanowire device has the capability of acting as a real-time, label-free, highly sensitivity and excellent selectivity SiNW-FET biosensor in detecting biomolecules.

Original languageEnglish
Title of host publicationAETA 2017 - Recent Advances in Electrical Engineering and Related Sciences - Theory and Application
PublisherSpringer Verlag
Pages250-257
Number of pages8
Volume465
ISBN (Print)9783319698137
DOIs
Publication statusPublished - Jan 1 2018
Event4th International Conference on Advanced Engineering Theory and Applications, AETA 2017 - Ho Chi Minh, Viet Nam
Duration: Dec 7 2017Dec 9 2017

Publication series

NameLecture Notes in Electrical Engineering
Volume465
ISSN (Print)1876-1100
ISSN (Electronic)1876-1119

Other

Other4th International Conference on Advanced Engineering Theory and Applications, AETA 2017
CountryViet Nam
CityHo Chi Minh
Period12/7/1712/9/17

Keywords

  • Biosensor
  • Field effect transistor
  • LOCOS
  • Silicon nanowire
  • SiNW

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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  • Cite this

    Wu, C. C., Manga, Y. B., Hung, J. Y., & Yang, W. L. (2018). A Novel Approach to Fabricate Silicon Nanowire Field Effect Transistor for Biomolecule Sensing. In AETA 2017 - Recent Advances in Electrical Engineering and Related Sciences - Theory and Application (Vol. 465, pp. 250-257). (Lecture Notes in Electrical Engineering; Vol. 465). Springer Verlag. https://doi.org/10.1007/978-3-319-69814-4_25