A linear-response CMOS-MEMS capacitive tactile sensor

C. T. Sun, Y. C. Lin, C. J. Hsieh, J. C. Liou, L. B. Wang, W. C. Tian

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A linear-response capacitive tactile sensor is presented in this work. The sensor was fabricated by the TSMC 0.35 μ m CMOS process and our self-developed MEMS post-process. The structure of the sensor consisted of one pair of parallel electrodes, with the central part of the membrane electrode hollowed out. A pillar with four beams at each side was set at the center to support the membrane electrode. This structure enhanced the uniformity of the deflection, and thus improved the linearity of the response. The wider dynamic range was also obtained because of the stiffer structure. In addition, the buckling of the membrane was lessened. The performance of this design was compared with the conventional parallel plate one. The measured linearity was 0.9728, and the dynamic range was 400mmHg, with the relieved buckling of 0.22 μm.

Original languageEnglish
Title of host publicationIEEE SENSORS 2012 - Proceedings
DOIs
Publication statusPublished - 2012
Externally publishedYes
Event11th IEEE SENSORS 2012 Conference - Taipei, Taiwan
Duration: Oct 28 2012Oct 31 2012

Conference

Conference11th IEEE SENSORS 2012 Conference
CountryTaiwan
CityTaipei
Period10/28/1210/31/12

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Sun, C. T., Lin, Y. C., Hsieh, C. J., Liou, J. C., Wang, L. B., & Tian, W. C. (2012). A linear-response CMOS-MEMS capacitive tactile sensor. In IEEE SENSORS 2012 - Proceedings [6411545] https://doi.org/10.1109/ICSENS.2012.6411545